Results 181 to 190 of about 118,840 (195)
Some of the next articles are maybe not open access.

Microfabrication in LiNbO3 by ion‐bombardment‐enhanced etching Available to Purchase

Journal of Vacuum Science and Technology, 1978
M Kawabe, S Namba
exaly  

High-Aspect-Ratio Grating Microfabrication by Platinum-Assisted Chemical Etching and Gold Electroplating

Advanced Engineering Materials, 2020
Marco Stampanoni   +2 more
exaly  

Direct writing for three-dimensional microfabrication using synchrotron radiation etching

Sensors and Actuators A: Physical, 2001
Takanori Katoh   +2 more
exaly  

Microfabrication by ion‐beam etching Available to Purchase

Journal of Vacuum Science and Technology, 1979
exaly  

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