Results 181 to 190 of about 118,840 (195)
Some of the next articles are maybe not open access.
Microfabrication in LiNbO3 by ion‐bombardment‐enhanced etching Available to Purchase
Journal of Vacuum Science and Technology, 1978M Kawabe, S Namba
exaly
Direct writing for three-dimensional microfabrication using synchrotron radiation etching
Sensors and Actuators A: Physical, 2001Takanori Katoh +2 more
exaly
Si etching in high-density SF6 plasmas for microfabrication: surface roughness formation
Microelectronic Engineering, 2004Evangelos Gogolides
exaly
Microfabrication by ion‐beam etching Available to Purchase
Journal of Vacuum Science and Technology, 1979exaly

