Terahertz MEMS actuators and applications. [PDF]
Wang Z +13 more
europepmc +1 more source
Functional Materials for ICE and IVUS Piezoelectric Transducers: A Review. [PDF]
He D, Ye B.
europepmc +1 more source
Wafer-scale integration of photonic integrated circuits and atomic vapor cells. [PDF]
Grosman A +4 more
europepmc +1 more source
PiezoMEMS Fabrication on Flexible Stainless-Steel Substrates. [PDF]
Nakamura K +5 more
europepmc +1 more source
A CMOS-Compatible Silicon Nanowire Array Natural Light Photodetector with On-Chip Temperature Compensation Using a PSO-BP Neural Network. [PDF]
Liu M +10 more
europepmc +1 more source
Tapered Pillar Design for High-Precision Force Readout in Miniaturized Engineered Heart Tissues From Human Pluripotent Stem Cells. [PDF]
Dostanić M +9 more
europepmc +1 more source
Experimental Realization of On-Chip Surface Acoustic Wave Metasurfaces at Sub-GHz. [PDF]
Wang W +10 more
europepmc +1 more source
Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage. [PDF]
Ma Y, Wang S, Wu ZS.
europepmc +1 more source
Quasi-anisotropic wet etching of glass creates inclined microstructures for advanced optical and MEMS devices. [PDF]
Yu J +9 more
europepmc +1 more source

