Results 171 to 180 of about 18,262 (225)

Terahertz MEMS actuators and applications. [PDF]

open access: yesMicrosyst Nanoeng
Wang Z   +13 more
europepmc   +1 more source

Wafer-scale integration of photonic integrated circuits and atomic vapor cells. [PDF]

open access: yesNanophotonics
Grosman A   +4 more
europepmc   +1 more source

PiezoMEMS Fabrication on Flexible Stainless-Steel Substrates. [PDF]

open access: yesSensors (Basel)
Nakamura K   +5 more
europepmc   +1 more source

Tapered Pillar Design for High-Precision Force Readout in Miniaturized Engineered Heart Tissues From Human Pluripotent Stem Cells. [PDF]

open access: yesAdv Healthc Mater
Dostanić M   +9 more
europepmc   +1 more source

Experimental Realization of On-Chip Surface Acoustic Wave Metasurfaces at Sub-GHz. [PDF]

open access: yesAdv Sci (Weinh)
Wang W   +10 more
europepmc   +1 more source

Quasi-anisotropic wet etching of glass creates inclined microstructures for advanced optical and MEMS devices. [PDF]

open access: yesMicrosyst Nanoeng
Yu J   +9 more
europepmc   +1 more source

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