Applications of Dry Film Photoresist in Micromachining: A Review. [PDF]
Zhang M, Meng F, Li X, Zeng W.
europepmc +1 more source
Precision‐Engineered Plasmonic Nanostar Arrays for High‐Performance SERS Sensing
Highly ordered and dose‐controlled arrays of gold nanodiscs are created using the dots‐on‐the‐fly EBL technique and subsequently converted into nanostar arrays. This technique unlocks the reproducible and robust fabrication of highly efficient SERS substrates. Abstract Surface‐enhanced Raman scattering (SERS) spectroscopy has emerged as a powerful tool
Alexandre Chícharo +9 more
wiley +1 more source
A MEMS wall shear stress sensor with floating cover plate for aerospace flow monitoring in harsh environments. [PDF]
Liu Y +7 more
europepmc +1 more source
This study reports an ultrathin graphene‐based strain sensor array fabricated on a 5 µm polyimide substrate. The array achieves millimeter‐scale spatial resolution (≈70 devices cm−2), high sensitivity with a gauge factor of 144, and reliable durability over 5000 cycles.
Wenchao Luo +10 more
wiley +1 more source
Microgravity-induced wet chemical etching of borosilicate glass enhances the process rate. [PDF]
Krakos A, Baranowski K, Białas M.
europepmc +1 more source
Silicon Microfabrication: Controlled Microfabrication of High‐Aspect‐Ratio Structures in Silicon at the Highest Etching Rates: The Role of H2O2 in the Anodic Dissolution of Silicon in Acidic Electrolytes (Adv. Funct. Mater. 6/2017) [PDF]
Chiara Cozzi +3 more
openalex +1 more source
A hydrophobic surface coating enables the in‐situ formation of a zinc fluoride‐rich solid electrolyte interphase (SEI) in zinc–bromine batteries. This SEI suppresses dendrite formation and water‐induced side reactions, leading to uniform zinc deposition, reduced voltage hysteresis, and extended cycle life. The strategy offers a scalable pathway to high‐
Norah S. Alghamdi +10 more
wiley +1 more source
Fabrication Process Development for Optical Channel Waveguides in Sputtered Aluminum Nitride. [PDF]
Mardani S +4 more
europepmc +1 more source
Microfabrication of membrane-based devices by deep-reactive ion etching (DRIE) of silicon
Ronald P. Manginell +4 more
openalex +1 more source
High‐temperature‐resistant single crystals of aluminum nitride works best for multilayer hexagonal boron nitride (hBN) epitaxy and annealing on large‐area dielectric wafers, promising for large‐scale integration and device applications of hBN. Abstract The epitaxy of high‐quality hexagonal boron nitride (hBN) multilayers on dielectric wafers is ...
Xu Yang +10 more
wiley +1 more source

