Results 11 to 20 of about 189,870 (274)
Plasma-Based Etching Approach for GEM Detector Microfabrication at FBK for X-ray polarimetry in space [PDF]
Journal of Instrumentation, 2023 Gas Electron Multiplier (GEM) detectors are crucial for enabling high-resolution X-ray polarization of astrophysical sources when coupled to custom pixel readout ASIC in Gas Pixel Detectors (GPD), as in the Imaging X-ray Polarimetry Explorer (IXPE), the ...
Alessandro Lega +10 more
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Microfabrication of Concave Micromirror for Microbial Cell Trapping Using K?hler Illumination by XeF2 Vapor Etching [PDF]
Sensors and materials, 2019 We demonstrated a Si-based concave micromirror array for cell trapping that was fabricated by XeF2 vapor etching. We also examined the optical properties of the focal image of each concave micromirror. In addition, yeast cell trapping was realized at the
Akihiro Matsutani +3 more
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Bio–Microfabrication of 2D and 3D Biomimetic Gut-on-a-Chip
Micromachines, 2023 Traditional goal of microfabrication was to limitedly construct nano- and micro-geometries on silicon or quartz wafers using various semiconductor manufacturing technologies, such as photolithography, soft lithography, etching, deposition, and so on ...
Yeongseok Jang, Jinmu Jung, Jonghyun Oh
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Nano-Micro Letters, 2021 Nanomaterials are known to exhibit a number of interesting physical and chemical properties for various applications, including energy conversion and storage, nanoscale electronics, sensors and actuators, photonics devices and even for biomedical ...
Lili Zhao +8 more
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Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis [PDF]
Micromachines, 2022 We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex ...
Aodong Zhang +9 more
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Microfabrication of Transparent Thermoplastic Resin Plates by Dry Etching
Journal of the Vacuum Society of Japan, 2009 This paper describes the microfabrication of transparent thermoplastic plates, polymethyl-methacrylate, polycarbonate, and cyclic olefin polymer by an electron cyclotron resonance-reactive ion etching (ECR-RIE) system. The system was adopted for the microstructure with smooth surface and high-aspect ratio.
S. Wakabayashi +3 more
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Microfabrication Technique by Gas Plasma Etching Method [PDF]
Japanese Journal of Applied Physics, 1976 The gas plasma etching technique is investigated as a tool of etching micro-patterns ranged from a few microns to submicrons mainly with polycrystalline silicon films as materials to be etched. The gas plasma etching is verified to be the "nearly ideal" chemical etching. The undercutting at the top of the polycrystalline silicon film is nearly equal to
Hiroyoshi Komiya +3 more
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Advanced Engineering Materials, 2020 Silicon carbide (SiC)‐based microsystems are promising alternatives for silicon‐based counterparts in a wide range of applications aiming at conditions of high temperature, high corrosion, and extreme vibration/shock.
Tuan‐Khoa Nguyen +13 more
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Opto-Electronic Advances, 2023 To improve the processing efficiency and extend the tuning range of 3D isotropic fabrication, we apply the simultaneous spatiotemporal focusing (SSTF) technique to a high-repetition-rate femtosecond (fs) fiber laser system. In the SSTF scheme, we propose
Yuanxin Tan +12 more
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Micromachines, 2022 Agarose microfabrication technology is one of the micropatterning techniques of cells having advantages of simple and flexible real-time fabrication of three-dimensional confinement microstructures even during cell cultivation.
Kenji Shimoda +5 more
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