Results 11 to 20 of about 194,573 (265)

Bio–Microfabrication of 2D and 3D Biomimetic Gut-on-a-Chip

Micromachines, 2023
Traditional goal of microfabrication was to limitedly construct nano- and micro-geometries on silicon or quartz wafers using various semiconductor manufacturing technologies, such as photolithography, soft lithography, etching, deposition, and so on ...
Yeongseok Jang, Jinmu Jung, Jonghyun Oh
doaj   +2 more sources

High‐Aspect‐Ratio Grating Microfabrication by Platinum‐Assisted Chemical Etching and Gold Electroplating [PDF]

Advanced Engineering Materials, 2020
Diffractive optics play a key role in hard X‐rays imaging for which many scientific, technological, and biomedical applications exist. Herein, high‐aspect‐ratio microfabrication of gratings for X‐ray interferometry is demonstrated using Pt as a catalyst ...
L. Romano, J. Vila-Comamala, K. Jefimovs, M. Stampanoni   +3 more
semanticscholar   +2 more sources

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis [PDF]

Micromachines, 2022
We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex ...
Aodong Zhang, Jian Xu, Yucen Li, Ming Hu, Zijie Lin, Yunpeng Song, Jia Qi, Wei Chen, Zhaoxiang Liu, Ya Cheng   +9 more
doaj   +2 more sources

Lithography and Etching‐Free Microfabrication of Silicon Carbide on Insulator Using Direct UV Laser Ablation 

Advanced Engineering Materials, 2020
Silicon carbide (SiC)‐based microsystems are promising alternatives for silicon‐based counterparts in a wide range of applications aiming at conditions of high temperature, high corrosion, and extreme vibration/shock.
Tuan‐Khoa Nguyen, Hoang‐Phuong Phan, K. Dowling, Ananth Saran Yalamarthy, Toan Dinh, V. Balakrishnan, Tanya Liu, C. Chapin, Quoc-Dung Truong, V. Dau, K. Goodson, D. Senesky, D. Dao, N. Nguyen   +13 more
semanticscholar   +3 more sources

Three-dimensional isotropic microfabrication in glass using spatiotemporal focusing of high-repetition-rate femtosecond laser pulses

Opto-Electronic Advances, 2023
To improve the processing efficiency and extend the tuning range of 3D isotropic fabrication, we apply the simultaneous spatiotemporal focusing (SSTF) technique to a high-repetition-rate femtosecond (fs) fiber laser system. In the SSTF scheme, we propose
Yuanxin Tan, Haotian Lv, Jian Xu, Aodong Zhang, Yunpeng Song, Jianping Yu, Wei Chen, Yuexin Wan, Zhaoxiang Liu, Zhaohui Liu, Jia Qi, Yangjian Cai, Ya Cheng   +12 more
doaj   +2 more sources

Design of experiment for the optimisation of deep reactive ion etching of silicon inserts for micro-fabrication [PDF]

, 2012
The following paper describes a design of experiments investigation of the deep reactive of pillar structures on a silicon wafer. The etched wafers would subsequently be used as masters for the fabrication of nickel mould inserts for microinjection ...
Alcock, Jeffrey R., Shaw, Christopher P., Wallis, K.   +2 more
core   +3 more sources

Fabrication and application of 3D Terahertz metamaterials with vertical multinanogaps for spectroscopic sensing [PDF]

Scientific Reports
Terahertz (THz) metamaterials have garnered attention for their unique electromagnetic properties and potential applications in biomaterial sensing, offering label-free, non-contact capabilities. However, their performance is limited by their diffraction
Naoki Inomata, Tomotsugu Takahashi, Yuki Sakai, Taiyu Okatani, Yoshiaki Kanamori   +4 more
doaj   +2 more sources

Manufacture of Three-Dimensional Optofluidic Spot-Size Converters in Fused Silica Using Hybrid Laser Microfabrication

Sensors, 2022
We propose a hybrid laser microfabrication approach for the manufacture of three-dimensional (3D) optofluidic spot-size converters in fused silica glass by a combination of femtosecond (fs) laser microfabrication and carbon dioxide laser irradiation ...
Jianping Yu, Jian Xu, Aodong Zhang, Yunpeng Song, Jia Qi, Qiaonan Dong, Jianfang Chen, Zhaoxiang Liu, Wei Chen, Ya Cheng   +9 more
doaj   +2 more sources

Selective laser etching fabrication of stacked microporous membranes for multisize particle separation in 3D microfluidics [PDF]

Scientific Reports
Glass substrates are widely utilized in microfluidic applications due to their exceptional properties, including optical transparency, biocompatibility, chemical and thermal stability, and compatibility with standard microfabrication techniques.
Diego Duran-Arteaga, William Chen, Darius G. Rackus, Virgilio Valente   +3 more
doaj   +2 more sources

Study on Electrical and Mechanical Properties of Double-End Supported Elastic Substrate Prepared by Wet Etching Process

Micromachines
Preparing elastic substrates as a carrier for dual-end supported nickel chromium thin film strain sensors is crucial. Wet etching is a vital microfabrication process widely used in producing microelectronic components for various applications.
Ding Song, Wenge Wu
doaj   +2 more sources