Results 11 to 20 of about 18,009 (279)

Microfabrication Technique by Gas Plasma Etching Method [PDF]

Japanese Journal of Applied Physics, 1976
The gas plasma etching technique is investigated as a tool of etching micro-patterns ranged from a few microns to submicrons mainly with polycrystalline silicon films as materials to be etched. The gas plasma etching is verified to be the "nearly ideal" chemical etching. The undercutting at the top of the polycrystalline silicon film is nearly equal to
Hiroyoshi Komiya, Hiroyasu Toyoda, Tadao Kato, Kumiko Inaba   +3 more
openalex   +2 more sources

Microfabrication of Transparent Thermoplastic Resin Plates by Dry Etching

Journal of the Vacuum Society of Japan, 2009
This paper describes the microfabrication of transparent thermoplastic plates, polymethyl-methacrylate, polycarbonate, and cyclic olefin polymer by an electron cyclotron resonance-reactive ion etching (ECR-RIE) system. The system was adopted for the microstructure with smooth surface and high-aspect ratio.
S. Wakabayashi, Takeshi Hitobo, Hirofumi NABESAWA, Minoru Seki   +3 more
openalex   +3 more sources

Microfabrication and Plating. Photolithography. Etching.

Journal of the Surface Finishing Society of Japan, 1995
Hisatake Sano
openalex   +3 more sources

Microfabrication of Thermoelectric Hydrogen Sensor Using KOH Solution Etching

Key Engineering Materials, 2006
Micromachined sensors are a new generation of sensor technology combining existing integrated circuit fabrication technology with novel deposition and etching processing. In the viewpoint of low-power operation, high sensitivity and fast response speed of thermoelectric hydrogen sensor (THS), we prepared the micromachined thermoelectric hydrogen sensor
Kazuki Tajima, Yeong Soo Choi, Woosuck Shin, Noriya Izu, Ichiro Matsubara, Norimitsu Murayama   +5 more
openalex   +2 more sources

Laser Synthesis and Microfabrication of Micro/Nanostructured Materials Toward Energy Conversion and Storage

Nano-Micro Letters, 2021
Nanomaterials are known to exhibit a number of interesting physical and chemical properties for various applications, including energy conversion and storage, nanoscale electronics, sensors and actuators, photonics devices and even for biomedical ...
Lili Zhao, Zhen Liu, Duo Chen, Fan Liu, Zhiyuan Yang, Xiao Li, Haohai Yu, Hong Liu, Weijia Zhou   +8 more
doaj   +1 more source

Microfabrication of the Array of Convex Microstructures of Silicon Using the Combined Etching Process with Bilayer Etching Mask

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2017
Sunao Murakami, Kazuhiro Araki, Shusuke Yamamoto, Takahiro Ito   +3 more
openalex   +2 more sources

Experimental investigation on anisotropic surface properties of crystalline silicon

Bibechana, 2012
Anisotropic etching of silicon has been studied by wet potassium hydroxide (KOH) etchant with its variation of temperature and concentration. Results presented here are temperature dependent etch rate along the crystallographic orientations. The etching
Shobha Kanta Lamichhane
doaj   +3 more sources

In Situ Agarose Microfabrication Technology Using Joule Heating of Micro Ionic Current for On-Chip Cell Network Analysis

Micromachines, 2022
Agarose microfabrication technology is one of the micropatterning techniques of cells having advantages of simple and flexible real-time fabrication of three-dimensional confinement microstructures even during cell cultivation.
Kenji Shimoda, Haruki Watanabe, Yoshitsune Hondo, Mitsuru Sentoku, Kazufumi Sakamoto, Kenji Yasuda   +5 more
doaj   +1 more source

Atmospheric Gas-Phase Catalyst Etching of SiO₂ for Deep Microfabrication Using HF Gas and Patterned Photoresist. [PDF]

ACS Appl Mater Interfaces
Sano KH, Ono Y, Tobinaga R, Imamura Y, Hayashi Y, Yanagitani T.   +5 more
europepmc   +3 more sources

Femtosecond-Laser-Induced All-Silicon Dielectric Metasurfaces Assisted by Wet Chemical Etching

Ultrafast Science, 2023
All-dielectric metasurfaces offer low material loss and strong field localization and are, therefore, well suited for ultrathin and compact optical devices for electomagnetic wave manipulation at the nanoscale.
Ioanna Sakellari, Sotiris Droulias, Andreas Lemonis, Emmanuel I. Stratakis   +3 more
doaj   +1 more source