Results 231 to 240 of about 189,870 (274)

Microfabrication of Poly(tetrafluoroethylene) Using SR Direct Etching

IEEJ Transactions on Electronics, Information and Systems, 2009
AbstractPolytetrafluoroethylene (PTFE) is a very attractive material for various fields because of its chemical resistance, insulation properties, and hydrophobic properties. However, it is difficult to fabricate PTFE microstructures with conventional techniques such as semiconductor processes or micromachining.
Shigeaki Yamamoto, Kozo Mochiji, Yoshiaki Ukita, Yoshiaki Ukita, Yuichi Utsumi   +4 more
openaire   +3 more sources

Laser-Based Technologies for Microfabrication of Key Electromagnetic Components of Miniaturized Vacuum Electron Devices

International Vacuum Electronics Conference, 2023
Recent results of fabrication of micron-sized electromagnetic structures and other components for vacuum microelectronic devices are presented. We focus on our practice of laser micromachining of electromagnetic structures for millimeter- and THz-band ...
A. Starodubov, V. Galushka, N. Ryskin, Alexander Galkin, Dmitrii Bessonov, D. Tuzhilin, D. Nozhkin   +6 more
semanticscholar   +1 more source

Microfabrication of the Array of Convex Microstructures of Silicon Using the Combined Etching Process with Bilayer Etching Mask

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2017
Sunao Murakami, Kazuhiro Araki, Shusuke Yamamoto, Takahiro Ito   +3 more
openalex   +3 more sources

Challenges of Semiconductor Microfabrication Technology for 3D Chiplet Integration

CPMT Symposium Japan, 2023
Chiplet integration technology, which has the potential to scalable expand capabilities by integrating many IC chips with different manufacturing processes, structures, and functions while maintaining the data transfer bandwidth between IC chips, is ...
Yasuhiro Morikawa
semanticscholar   +1 more source

Study of Micro- and Nanopatterned Aluminum Surfaces Using Different Microfabrication Processes for Water Management.

Langmuir, 2022
Superhydrophobic surfaces demonstrate extreme water-repellence, promoting drop-wise over film-wise condensation, increasing liquid mobility, and reducing thermal resistance for heat-exchanger applications.
Kirill Misiiuk, S. Lowrey, R. Blaikie, Josselin Juras, A. Sommers   +4 more
semanticscholar   +1 more source

Chalcogenide Glass IR Artificial Compound Eyes Based on Femtosecond Laser Microfabrication

Advanced Materials & Technologies, 2022
The compact and lightweight infrared (IR) optics devices are highly demanded in booming applications. However, fabrication of IR optics devices with high efficiency is still technically challenging, especially artificial compound eyes (ACE) with low ...
Shaokun Wang, Fan Zhang, Q. Yang, Minjing Li, Xun Hou, F. Chen   +5 more
semanticscholar   +1 more source

Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 2023
Due to their enhanced piezoelectric coefficient, aluminum scandium nitride thin films have been a promising piezoelectric material for MEMS, in particular for RF filters applications.
Tamara Terzic, Nikolai Andrianov, Mustapha Chouiki, D. Solonenko, Annalisa De Pastina, Vladimir Pashchenko, Sarah Risquez   +6 more
semanticscholar   +1 more source

Microfabrication of diamond films: selective deposition and etching

Surface and Coatings Technology, 1991
Abstract For the future application of diamond films to microelectronic devices and sensors, it is necessary to develop methods for making patterns a few micrometers wide of diamond films on substrates. To this end, two different methods of selected-area deposition were developed: reactive-ion etching and amorphous silicon masking of silicon ...
Jeffrey T. Glass, Kazuo Kumagai, Koichi Miyata, Akimitsu Nakaue, Koji Kobashi, Shigeaki Miyauchi, Ian M. Buckley-Golder, Kozo Nishimura   +7 more
openaire   +2 more sources

Microfabrication of plasma nanotorch tips for localized etching and deposition

2010 IEEE Sensors, 2010
We present the microfabrication and initial testing of an AFM-tip like device, or nanotorch, that is capable of generating a very localized microplasma at its tip. The submicron region near its tip provides a unique manufacturing environment where new methods for controlled direct-write micro and nanofabrication can be tested.
Wen Yuan, Carlos H. Mastrangelo, Massood Tabib-Azar, Yan Xie   +3 more
openaire   +2 more sources

Wafer-scale microfabrication of flexible organic electrochemical transistors

Flexible and Printed Electronics, 2022
We describe a photolithographic process to fabricate organic microdevices on flexible substrates that relies on photolithography and dry etching and is entirely compatible with standard cleanroom wafer processing equipment.
Quentin Thiburce, N. Melosh, A. Salleo
semanticscholar   +1 more source