Results 21 to 30 of about 189,870 (274)

Fabrication and application of 3D Terahertz metamaterials with vertical multinanogaps for spectroscopic sensing [PDF]

Scientific Reports
Terahertz (THz) metamaterials have garnered attention for their unique electromagnetic properties and potential applications in biomaterial sensing, offering label-free, non-contact capabilities. However, their performance is limited by their diffraction
Naoki Inomata, Tomotsugu Takahashi, Yuki Sakai, Taiyu Okatani, Yoshiaki Kanamori   +4 more
doaj   +2 more sources

Manufacture of Three-Dimensional Optofluidic Spot-Size Converters in Fused Silica Using Hybrid Laser Microfabrication

Sensors, 2022
We propose a hybrid laser microfabrication approach for the manufacture of three-dimensional (3D) optofluidic spot-size converters in fused silica glass by a combination of femtosecond (fs) laser microfabrication and carbon dioxide laser irradiation ...
Jianping Yu, Jian Xu, Aodong Zhang, Yunpeng Song, Jia Qi, Qiaonan Dong, Jianfang Chen, Zhaoxiang Liu, Wei Chen, Ya Cheng   +9 more
doaj   +2 more sources

Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si

Optics Express, 2003
We report on the microfabrication of continuous aspherical optical surfaces with a single-mask process, using anisotropic etching of silicon in a KOH water solution. Precise arbitrary aspherical surfaces with lateral scales on the order of several millimeters and a profile depth on the order of several micrometers were fabricated using this process. We
Davies William de Lima Monteiro, O. Akhzar-Mehr, P.M. Sarro, Gleb Vdovin   +3 more
openalex   +4 more sources

Study on Electrical and Mechanical Properties of Double-End Supported Elastic Substrate Prepared by Wet Etching Process

Micromachines
Preparing elastic substrates as a carrier for dual-end supported nickel chromium thin film strain sensors is crucial. Wet etching is a vital microfabrication process widely used in producing microelectronic components for various applications.
Ding Song, Wenge Wu
doaj   +2 more sources

Size-Effect-Based Dimension Compensations in Wet Etching for Micromachined Quartz Crystal Microstructures

Micromachines
Microfabrication technology with quartz crystals is gaining importance as the miniaturization of quartz MEMS devices is essential to ensure the development of portable and wearable electronics.
Yide Dong, Guangbin Dou, Zibiao Wei, Shanshan Ji, Huihui Dai, Kaiqin Tang, Litao Sun   +6 more
doaj   +2 more sources

Advancing Nanoscale Copper Deposition Through Ultrafast-Laser-Activated Surface Chemistry [PDF]

Nanomaterials
Direct-writing submicron copper circuits on glass with laser precision—without lithography, vacuum deposition, or etching—represents a transformative step in next-generation microfabrication.
Modestas Sadauskas, Romualdas Trusovas, Evaldas Kvietkauskas, Viktorija Vrubliauskaitė, Ina Stankevičienė, Aldona Jagminienė, Tomas Murauskas, Dainius Balkauskas, Alexandr Belosludtsev, Karolis Ratautas   +9 more
doaj   +2 more sources

Plasma-based etching approach for GEM detector microfabrication at FBK for X-ray polarimetry in space [PDF]

Journal of Instrumentation
Abstract Gas Electron Multiplier (GEM) detectors are crucial for enabling high-resolution X-ray polarization of astrophysical sources when coupled to custom pixel readout ASIC in Gas Pixel Detectors (GPD), as in the Imaging X-ray Polarimetry Explorer (IXPE), the Polarlight cubesat pathfinder and the PFA telescope onboard the future ...
Alessandro Lega, David Novel, T. Facchinelli, C. Sgrò, L. Baldini, M. Minuti, M. Boscardin, G. Pepponi, R. Iuppa, R. Hall-Wilton, L. Latronico   +10 more
openalex   +4 more sources

Design of experiment for the optimisation of deep reactive ion etching of silicon inserts for microfabrication [PDF]

, 2012
The following paper describes a design of experiments investigation of the deep reactive of pillar structures on a silicon wafer. The etched wafers would subsequently be used as masters for the fabrication of nickel mould inserts for microinjection ...
Kirsty Wallis, Christopher Shaw, Jeffrey R. Alcock   +2 more
openalex   +4 more sources

Silicon micromachined hollow microneedles for transdermal liquid transfer [PDF]

, 2002
This paper presents an improved design and fabrication process [ 13 for hollow micro needles with the proper mechanical strength and sharpness to be applied for painless transdermal transfer of liquids.
Berenschot, J.W., Berg, A. van den, Boer, M.J. de, Gardeniers, J.G.E., Hefetz, M., Oever, R. van 't, Yeshurun, Y.   +6 more
core   +11 more sources

Experimental investigation on anisotropic surface properties of crystalline silicon

Bibechana, 2012
Anisotropic etching of silicon has been studied by wet potassium hydroxide (KOH) etchant with its variation of temperature and concentration. Results presented here are temperature dependent etch rate along the crystallographic orientations. The etching
Shobha Kanta Lamichhane
doaj   +3 more sources