Results 21 to 30 of about 18,009 (279)
Biosensors, 2021 We report the microfabrication and characterization of gold microband electrodes on silicon using standard microfabrication methods, i.e., lithography and etching techniques. A two-step electrodeposition process was carried out using the on-chip platinum
Julia Madden +5 more
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Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si
Optics Express, 2003 We report on the microfabrication of continuous aspherical optical surfaces with a single-mask process, using anisotropic etching of silicon in a KOH water solution. Precise arbitrary aspherical surfaces with lateral scales on the order of several millimeters and a profile depth on the order of several micrometers were fabricated using this process. We
Davies William de Lima Monteiro +3 more
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AIP Advances, 2021 Anisotropic pyrochemical micro-etching induced by synchrotron x-ray irradiation is developed as a microfabrication process for fluorinated ethylene propylene (FEP). X-ray irradiation is performed at room temperature, and the irradiation area is etched by
Kaito Fujitani +4 more
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Micromachines, 2018 This work demonstrated the surface microfabrication of the UV-transparent fluoropolymer CYTOP (perfluoro 1-butenyl vinyl ether), by etching-assisted ablation using lasers with different pulse widths.
Keisuke Nemoto, Yasutaka Hanada
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Microfabrication of Laser-Driven Accelerator Structures [PDF]
, 2002 We discuss the potential for using microfabrication techniques for laser-driven accelerator construction. We introduce microfabrication processes in general, and then describe our investigation of a particular trial process.
Cowan, Benjamin
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High‐Aspect‐Ratio Grating Microfabrication by Platinum‐Assisted Chemical Etching and Gold Electroplating [PDF]
Advanced Engineering Materials, 2020 Diffractive optics play a key role in hard X‐rays imaging for which many scientific, technological, and biomedical applications exist. Herein, high‐aspect‐ratio microfabrication of gratings for X‐ray interferometry is demonstrated using Pt as a catalyst for the metal assisted chemical etching of Si in a solution of HF and H2O2.
Lucia Romano +3 more
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Micromachines, 2022 We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex ...
Aodong Zhang +9 more
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In vivo measurements with robust silicon-based multielectrode arrays with extreme shaft lengths [PDF]
, 2013 In this paper, manufacturing and in vivo testing of extreme-long Si-based neural microelectrode arrays are presented. Probes with different shaft lengths (15–70 mm) are formed by deep reactive ion etching and have been equipped with platinum electrodes ...
Baracskay, Péter +7 more
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Detachable three-layer Au absorber microfabrication for low-temperature detectors
Micro and Nano Engineering, 2023 Low temperature detectors (LTDs) used for decay energy spectrometry (DES) can provide accurate and reliable decay data thanks to their high-energy resolution and a near 100% detection efficiency for the radiations of interest. However, it is essential to
Jawad Hadid +7 more
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Lithographic band gap tuning in photonic band gap crystals [PDF]
, 1996 We describe the lithographic control over the spectral response of three-dimensional photonic crystals. By precise microfabrication of the geometry using a reproducible and reliable procedure consisting of electron beam lithography followed by dry ...
Arbet-Engels, V. +3 more
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