Sensors, 2022 We propose a hybrid laser microfabrication approach for the manufacture of three-dimensional (3D) optofluidic spot-size converters in fused silica glass by a combination of femtosecond (fs) laser microfabrication and carbon dioxide laser irradiation ...
Jianping Yu +9 more
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Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si
Optics Express, 2003 We report on the microfabrication of continuous aspherical optical surfaces with a single-mask process, using anisotropic etching of silicon in a KOH water solution. Precise arbitrary aspherical surfaces with lateral scales on the order of several millimeters and a profile depth on the order of several micrometers were fabricated using this process. We
Davies William de Lima Monteiro +3 more
openalex +4 more sources
MicromachinesPreparing elastic substrates as a carrier for dual-end supported nickel chromium thin film strain sensors is crucial. Wet etching is a vital microfabrication process widely used in producing microelectronic components for various applications.
Ding Song, Wenge Wu
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Selective laser etching fabrication of stacked microporous membranes for multisize particle separation in 3D microfluidics [PDF]
Scientific ReportsGlass substrates are widely utilized in microfluidic applications due to their exceptional properties, including optical transparency, biocompatibility, chemical and thermal stability, and compatibility with standard microfabrication techniques.
Diego Duran-Arteaga +3 more
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MicromachinesMicrofabrication technology with quartz crystals is gaining importance as the miniaturization of quartz MEMS devices is essential to ensure the development of portable and wearable electronics.
Yide Dong +6 more
doaj +2 more sources
Damage-Free Vertical Microfabrication of α-Quartz via HF Gas-Phase Catalyst Etching. [PDF]
ACS Appl Mater InterfacesSano KH +6 more
europepmc +2 more sources
Plasma-based etching approach for GEM detector microfabrication at FBK for X-ray polarimetry in space [PDF]
Journal of InstrumentationAbstract Gas Electron Multiplier (GEM) detectors are crucial for enabling high-resolution X-ray polarization of astrophysical sources when coupled to custom pixel readout ASIC in Gas Pixel Detectors (GPD), as in the Imaging X-ray Polarimetry Explorer (IXPE), the Polarlight cubesat pathfinder and the PFA telescope onboard the future ...
Alessandro Lega +10 more
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Advancing Nanoscale Copper Deposition Through Ultrafast-Laser-Activated Surface Chemistry [PDF]
NanomaterialsDirect-writing submicron copper circuits on glass with laser precision—without lithography, vacuum deposition, or etching—represents a transformative step in next-generation microfabrication.
Modestas Sadauskas +9 more
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Experimental investigation on anisotropic surface properties of crystalline silicon
Bibechana, 2012 Anisotropic etching of silicon has been studied by wet potassium hydroxide (KOH) etchant with its variation of temperature and concentration. Results presented here are temperature dependent etch rate along the crystallographic orientations. The etching
Shobha Kanta Lamichhane
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Isotropic plasma-thermal atomic layer etching of superconducting titanium nitride films using sequential exposures of molecular oxygen and SF6/H2 plasma [PDF]
Journal of Vacuum Science & Technology A, 2023 Microwave loss in superconducting TiN films is attributed to two-level systems in various interfaces arising in part from oxidation and microfabrication-induced damage.
Azmain A. Hossain +6 more
semanticscholar +1 more source