Results 21 to 30 of about 194,573 (265)

Size-Effect-Based Dimension Compensations in Wet Etching for Micromachined Quartz Crystal Microstructures

Micromachines
Microfabrication technology with quartz crystals is gaining importance as the miniaturization of quartz MEMS devices is essential to ensure the development of portable and wearable electronics.
Yide Dong, Guangbin Dou, Zibiao Wei, Shanshan Ji, Huihui Dai, Kaiqin Tang, Litao Sun   +6 more
doaj   +2 more sources

Damage-Free Vertical Microfabrication of α-Quartz via HF Gas-Phase Catalyst Etching. [PDF]

ACS Appl Mater Interfaces
Sano KH, Ono Y, Tsukiyama K, Nagai S, Saito A, Hayashi Y, Yanagitani T.   +6 more
europepmc   +3 more sources

Microfabrication techniques and device applications of single crystalline diamond

Functional Diamond
Diamond has many excellent physicochemical properties including ultrahigh hardness, wide bandgap, outstanding thermal conductivity, and high electron mobility, which has emerged as a critical material for high-power electronics, quantum technologies, and
Tiqing Zhao, Wenjun Liang, Pak San Yip, Anliang Lu, Yang Lu   +4 more
doaj   +2 more sources

Microfabrication of high performance optical diaphragm by plasma ion beam etching technology [PDF]

International Conference on Space Optics, 2018
A. Mestreau, H. Bernardet, Guy Dancoing, X. Godechot, C. Pezant, V. Stenger, B. Cousin, P. Etcheto, G. Otrio   +8 more
semanticscholar   +2 more sources

Controlled Microfabrication of High‐Aspect‐Ratio Structures in Silicon at the Highest Etching Rates: The Role of H2O2 in the Anodic Dissolution of Silicon in Acidic Electrolytes

, 2017
C. Cozzi, G. Polito, K. Kolasinski, G. Barillaro   +3 more
semanticscholar   +3 more sources

Experimental investigation on anisotropic surface properties of crystalline silicon

Bibechana, 2012
Anisotropic etching of silicon has been studied by wet potassium hydroxide (KOH) etchant with its variation of temperature and concentration. Results presented here are temperature dependent etch rate along the crystallographic orientations. The etching
Shobha Kanta Lamichhane
doaj   +3 more sources

Isotropic plasma-thermal atomic layer etching of superconducting titanium nitride films using sequential exposures of molecular oxygen and SF6/H2 plasma [PDF]

Journal of Vacuum Science & Technology A, 2023
Microwave loss in superconducting TiN films is attributed to two-level systems in various interfaces arising in part from oxidation and microfabrication-induced damage.
Azmain A. Hossain, Haozhe Wang, David S. Catherall, M. Leung, H. Knoops, J. R. Renzas, A. Minnich   +6 more
semanticscholar   +1 more source

In Situ Agarose Microfabrication Technology Using Joule Heating of Micro Ionic Current for On-Chip Cell Network Analysis

Micromachines, 2022
Agarose microfabrication technology is one of the micropatterning techniques of cells having advantages of simple and flexible real-time fabrication of three-dimensional confinement microstructures even during cell cultivation.
Kenji Shimoda, Haruki Watanabe, Yoshitsune Hondo, Mitsuru Sentoku, Kazufumi Sakamoto, Kenji Yasuda   +5 more
doaj   +1 more source

Femtosecond-Laser-Induced All-Silicon Dielectric Metasurfaces Assisted by Wet Chemical Etching

Ultrafast Science, 2023
All-dielectric metasurfaces offer low material loss and strong field localization and are, therefore, well suited for ultrathin and compact optical devices for electomagnetic wave manipulation at the nanoscale.
Ioanna Sakellari, Sotiris Droulias, Andreas Lemonis, Emmanuel I. Stratakis   +3 more
doaj   +1 more source

On-Chip Glucose Detection Based on Glucose Oxidase Immobilized on a Platinum-Modified, Gold Microband Electrode

Biosensors, 2021
We report the microfabrication and characterization of gold microband electrodes on silicon using standard microfabrication methods, i.e., lithography and etching techniques. A two-step electrodeposition process was carried out using the on-chip platinum
Julia Madden, Colm Barrett, Fathima R. Laffir, Michael Thompson, Paul Galvin, Alan O’ Riordan   +5 more
doaj   +1 more source