Results 31 to 40 of about 194,573 (265)

Etching-Assisted Ablation of the UV-Transparent Fluoropolymer CYTOP Using Various Laser Pulse Widths and Subsequent Microfluidic Applications

open access: yesMicromachines, 2018
This work demonstrated the surface microfabrication of the UV-transparent fluoropolymer CYTOP (perfluoro 1-butenyl vinyl ether), by etching-assisted ablation using lasers with different pulse widths.
Keisuke Nemoto, Yasutaka Hanada
doaj   +1 more source

Anisotropic pyrochemical dry etching of fluorinated ethylene propylene induced by pre-irradiation with synchrotron radiation

open access: yesAIP Advances, 2021
Anisotropic pyrochemical micro-etching induced by synchrotron x-ray irradiation is developed as a microfabrication process for fluorinated ethylene propylene (FEP). X-ray irradiation is performed at room temperature, and the irradiation area is etched by
Kaito Fujitani   +4 more
doaj   +1 more source

Microfabrication of Laser-Driven Accelerator Structures [PDF]

open access: yes, 2002
We discuss the potential for using microfabrication techniques for laser-driven accelerator construction. We introduce microfabrication processes in general, and then describe our investigation of a particular trial process.
Cowan, Benjamin
core   +2 more sources

Lithographic band gap tuning in photonic band gap crystals [PDF]

open access: yes, 1996
We describe the lithographic control over the spectral response of three-dimensional photonic crystals. By precise microfabrication of the geometry using a reproducible and reliable procedure consisting of electron beam lithography followed by dry ...
Arbet-Engels, V.   +3 more
core   +1 more source

Detachable three-layer Au absorber microfabrication for low-temperature detectors

open access: yesMicro and Nano Engineering, 2023
Low temperature detectors (LTDs) used for decay energy spectrometry (DES) can provide accurate and reliable decay data thanks to their high-energy resolution and a near 100% detection efficiency for the radiations of interest. However, it is essential to
Jawad Hadid   +7 more
doaj   +1 more source

In vivo measurements with robust silicon-based multielectrode arrays with extreme shaft lengths [PDF]

open access: yes, 2013
In this paper, manufacturing and in vivo testing of extreme-long Si-based neural microelectrode arrays are presented. Probes with different shaft lengths (15–70 mm) are formed by deep reactive ion etching and have been equipped with platinum electrodes ...
Baracskay, Péter   +7 more
core   +1 more source

Two-step hybrid process of movable part inside glass substrate using ultrafast laser

open access: yesMicro and Nano Systems Letters, 2021
We demonstrate a two-step hybrid process for fabricating movable parts inside glass substrate using the selective laser-induced etching (SLE) process that is consisted of laser-direct writing and wet chemical etching.
Jeongtae Kim   +4 more
doaj   +1 more source

Three-dimensional microstructuring of yttrium aluminum garnet crystals for laser active optofluidic applications [PDF]

open access: yes, 2013
The following article appeared in Applied Physics Letters 103.4 (2013): 041101 and may be found at http://scitation.aip.org/content/aip/journal/apl/103/4/10.1063/1.4816338We demonstrate three-dimensional microstructuring in a neodymium doped yttrium ...
Choudhury, Debaditya   +5 more
core   +2 more sources

SF6 Optimized O2 Plasma Etching of Parylene C

open access: yesMicromachines, 2018
Parylene C is a widely used polymer material in microfabrication because of its excellent properties such as chemical inertness, biocompatibility and flexibility.
Lingqian Zhang   +3 more
doaj   +1 more source

Fabrication of Planar Microelectrode Array Using Laser-Patterned ITO and SU-8

open access: yesMicromachines, 2021
For several decades, microelectrode array (MEA) has been a powerful tool for in vitro neural electrophysiology because it provides a unique approach for monitoring the activity of a number of neurons over time.
Hee Soo Jeong   +3 more
doaj   +1 more source

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