Two-step hybrid process of movable part inside glass substrate using ultrafast laser
Micro and Nano Systems Letters, 2021 We demonstrate a two-step hybrid process for fabricating movable parts inside glass substrate using the selective laser-induced etching (SLE) process that is consisted of laser-direct writing and wet chemical etching.
Jeongtae Kim +4 more
doaj +1 more source
SF6 Optimized O2 Plasma Etching of Parylene C
Micromachines, 2018 Parylene C is a widely used polymer material in microfabrication because of its excellent properties such as chemical inertness, biocompatibility and flexibility.
Lingqian Zhang +3 more
doaj +1 more source
Three-dimensional microstructuring of yttrium aluminum garnet crystals for laser active optofluidic applications [PDF]
, 2013 The following article appeared in Applied Physics Letters 103.4 (2013): 041101 and may be found at http://scitation.aip.org/content/aip/journal/apl/103/4/10.1063/1.4816338We demonstrate three-dimensional microstructuring in a neodymium doped yttrium ...
Choudhury, Debaditya +5 more
core +2 more sources
Fabrication of Planar Microelectrode Array Using Laser-Patterned ITO and SU-8
Micromachines, 2021 For several decades, microelectrode array (MEA) has been a powerful tool for in vitro neural electrophysiology because it provides a unique approach for monitoring the activity of a number of neurons over time.
Hee Soo Jeong +3 more
doaj +1 more source
Effects of Surface Microtopography on Wettability of Poly(dimethylsiloxane) Film: Superhydrophobicity [PDF]
علوم و تکنولوژی پلیمر, 2020 Hypothesis: Recent advances in micro- and nanotechnology have led to possible design of functional micro/nanostructured surfaces with micro/nanotopography features that can exhibit low adhesion properties.
Shayesteh Khakvand +3 more
doaj +1 more source
A Microfluidic Platform for Precision Small-volume Sample Processing and Its Use to Size Separate Biological Particles with an Acoustic Microdevice. [PDF]
, 2015 A major advantage of microfluidic devices is the ability to manipulate small sample volumes, thus reducing reagent waste and preserving precious sample. However, to achieve robust sample manipulation it is necessary to address device integration with the
Benett, William J +7 more
core +1 more source
Sensors, 2022 We propose a hybrid laser microfabrication approach for the manufacture of three-dimensional (3D) optofluidic spot-size converters in fused silica glass by a combination of femtosecond (fs) laser microfabrication and carbon dioxide laser irradiation ...
Jianping Yu +9 more
doaj +1 more source
Microfabrication of palladium-silver alloy membranes for hydrogen separation [PDF]
, 2003 In this paper, a process for the microfabrication of a wafer-scale palladium-silver alloy membrane (Pd-Ag) is presented. Pd-Ag alloy films containing 23 wt% Ag were prepared by co-sputtering from pure Pd and Ag targets.
Berenschot, Johan W. +10 more
core +2 more sources
Integrated movable micromechanical structures for sensors and actuators [PDF]
, 1988 Movable pin-joints, gears, springs, cranks, and slider structures with dimensions measured in micrometers have been fabricated using silicon microfabrication technology.
Fan, Long-Sheng +2 more
core +1 more source
Materials Research Letters, 2018 Etching rate is a major concern for the effective mass production of high-aspect-ratio microstructures, especially in p-type silicon. In this work, controlled electrochemical growth of high-aspect-ratio (from 15 to 110) macropores in p-type silicon at ...
Daohan Ge +8 more
doaj +1 more source