Results 31 to 40 of about 192,249 (295)
Femtosecond-Laser-Induced All-Silicon Dielectric Metasurfaces Assisted by Wet Chemical Etching
Ultrafast Science, 2023 All-dielectric metasurfaces offer low material loss and strong field localization and are, therefore, well suited for ultrathin and compact optical devices for electomagnetic wave manipulation at the nanoscale.
Ioanna Sakellari +3 more
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Biosensors, 2021 We report the microfabrication and characterization of gold microband electrodes on silicon using standard microfabrication methods, i.e., lithography and etching techniques. A two-step electrodeposition process was carried out using the on-chip platinum
Julia Madden +5 more
doaj +1 more source
AIP Advances, 2021 Anisotropic pyrochemical micro-etching induced by synchrotron x-ray irradiation is developed as a microfabrication process for fluorinated ethylene propylene (FEP). X-ray irradiation is performed at room temperature, and the irradiation area is etched by
Kaito Fujitani +4 more
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Micromachines, 2018 This work demonstrated the surface microfabrication of the UV-transparent fluoropolymer CYTOP (perfluoro 1-butenyl vinyl ether), by etching-assisted ablation using lasers with different pulse widths.
Keisuke Nemoto, Yasutaka Hanada
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Advanced Intelligent Systems, 2023 Fabrication of actuatable micromechanisms onto the tip of submillimeter medical instruments permits microsurgery, cellular‐level intervention, targeted drug delivery, or placement of microimplants.
Maura Power +3 more
semanticscholar +1 more source
Microfabrication of Laser-Driven Accelerator Structures [PDF]
, 2002 We discuss the potential for using microfabrication techniques for laser-driven accelerator construction. We introduce microfabrication processes in general, and then describe our investigation of a particular trial process.
Cowan, Benjamin
core +2 more sources
Lithographic band gap tuning in photonic band gap crystals [PDF]
, 1996 We describe the lithographic control over the spectral response of three-dimensional photonic crystals. By precise microfabrication of the geometry using a reproducible and reliable procedure consisting of electron beam lithography followed by dry ...
Arbet-Engels, V. +3 more
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Detachable three-layer Au absorber microfabrication for low-temperature detectors
Micro and Nano Engineering, 2023 Low temperature detectors (LTDs) used for decay energy spectrometry (DES) can provide accurate and reliable decay data thanks to their high-energy resolution and a near 100% detection efficiency for the radiations of interest. However, it is essential to
Jawad Hadid +7 more
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In vivo measurements with robust silicon-based multielectrode arrays with extreme shaft lengths [PDF]
, 2013 In this paper, manufacturing and in vivo testing of extreme-long Si-based neural microelectrode arrays are presented. Probes with different shaft lengths (15–70 mm) are formed by deep reactive ion etching and have been equipped with platinum electrodes ...
Baracskay, Péter +7 more
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SF6 Optimized O2 Plasma Etching of Parylene C
Micromachines, 2018 Parylene C is a widely used polymer material in microfabrication because of its excellent properties such as chemical inertness, biocompatibility and flexibility.
Lingqian Zhang +3 more
doaj +1 more source