Results 31 to 40 of about 189,870 (274)
Isotropic plasma-thermal atomic layer etching of superconducting titanium nitride films using sequential exposures of molecular oxygen and SF6/H2 plasma [PDF]
Journal of Vacuum Science & Technology A, 2023 Microwave loss in superconducting TiN films is attributed to two-level systems in various interfaces arising in part from oxidation and microfabrication-induced damage.
Azmain A. Hossain +6 more
semanticscholar +1 more source
Femtosecond-Laser-Induced All-Silicon Dielectric Metasurfaces Assisted by Wet Chemical Etching
Ultrafast Science, 2023 All-dielectric metasurfaces offer low material loss and strong field localization and are, therefore, well suited for ultrathin and compact optical devices for electomagnetic wave manipulation at the nanoscale.
Ioanna Sakellari +3 more
doaj +1 more source
AIP Advances, 2021 Anisotropic pyrochemical micro-etching induced by synchrotron x-ray irradiation is developed as a microfabrication process for fluorinated ethylene propylene (FEP). X-ray irradiation is performed at room temperature, and the irradiation area is etched by
Kaito Fujitani +4 more
doaj +1 more source
Biosensors, 2021 We report the microfabrication and characterization of gold microband electrodes on silicon using standard microfabrication methods, i.e., lithography and etching techniques. A two-step electrodeposition process was carried out using the on-chip platinum
Julia Madden +5 more
doaj +1 more source
Micromachines, 2018 This work demonstrated the surface microfabrication of the UV-transparent fluoropolymer CYTOP (perfluoro 1-butenyl vinyl ether), by etching-assisted ablation using lasers with different pulse widths.
Keisuke Nemoto, Yasutaka Hanada
doaj +1 more source
Advanced Intelligent Systems, 2023 Fabrication of actuatable micromechanisms onto the tip of submillimeter medical instruments permits microsurgery, cellular‐level intervention, targeted drug delivery, or placement of microimplants.
Maura Power +3 more
semanticscholar +1 more source
Microfabrication of Laser-Driven Accelerator Structures [PDF]
, 2002 We discuss the potential for using microfabrication techniques for laser-driven accelerator construction. We introduce microfabrication processes in general, and then describe our investigation of a particular trial process.
Cowan, Benjamin
core +2 more sources
Lithographic band gap tuning in photonic band gap crystals [PDF]
, 1996 We describe the lithographic control over the spectral response of three-dimensional photonic crystals. By precise microfabrication of the geometry using a reproducible and reliable procedure consisting of electron beam lithography followed by dry ...
Arbet-Engels, V. +3 more
core +1 more source
Design, fabrication and characterization of monolithic embedded parylene microchannels in silicon substrate [PDF]
, 2006 This paper presents a novel channel fabrication technology of bulk-micromachined monolithic embedded polymer channels in silicon substrate. The fabrication process favorably obviates the need for sacrifical materials in surface-micromachined channels and
Chen, Po-Jui +2 more
core +2 more sources
New fabrication techniques for high quality photonic crystals [PDF]
, 1997 We have developed new methods for the fabrication of high quality two-dimensional (2D) and three-dimensional (3D) photonic crystals. These techniques involve anisotropic etching and steam oxidation of AlAs mask layers.
Cheng, Chuan C. +5 more
core +1 more source