Mechanism of Vapor-Phase Infiltration of Organometallic Hf in Poly(Methyl Methacrylate) for Hybrid Resist Applications. [PDF]
Chowdhury MI +10 more
europepmc +1 more source
Resolving In Situ Exposure Dynamics in a Chemically Amplified EUV Photoresist Using Table-Top EUV Photoemission Spectroscopy. [PDF]
Singh DP +11 more
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Table-top three-dimensional photoemission orbital tomography with a femtosecond extreme ultraviolet light source. [PDF]
Bennecke W +13 more
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SuryaBench: Benchmark Dataset for Advancing Machine Learning in Heliophysics and Space Weather Prediction. [PDF]
Roy S +24 more
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A Twist in Electronic Relaxation of Pyrimidine Nucleosides and Nucleotides: Impact of C5 Methylation on Nonadiabatic Transition and Photohydration Damage. [PDF]
Ghosh S +7 more
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Conformal SiNx Coating on Carbon Nanotubes via Transient UV-Ozone Functionalization and Two-Step Atomic Layer Deposition. [PDF]
Kang YW +5 more
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Axial X-Ray Microscopy in Nanotomography. [PDF]
Gaikovich KP +3 more
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The Role of the Anion Insertion-Extraction Reaction in Amorphous Carbon Thin Film Electrodes on the Vanadium(IV/V) Reaction Probed by Scanning Electrochemical Cell Microscopy. [PDF]
Hamann M +5 more
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VIS-XUV Optical Constants and Electronic Band Parameters of a Tin-Oxo Cage Photoresist (Sn<sub>12</sub>O<sub>24</sub>C<sub>52</sub>H<sub>120</sub>). [PDF]
Werner WSM +5 more
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Polytelluoxane as the ideal formulation for EUV photoresist. [PDF]
Zhou R, Cao M, Tan Y, Neisser M, Xu H.
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