Results 281 to 290 of about 43,392 (299)
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Spectroscopy in the extreme ultraviolet on an electron beam ion trap
Review of Scientific Instruments, 1999P Beiersdorfer +2 more
exaly
Extreme ultraviolet lithography and three dimensional integrated circuit—A review
Applied Physics Reviews, 2014exaly
Resist pattern fluctuation limits in extreme-ultraviolet lithography
Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1994Taro Ogawa, Hiromasa Yamanashi
exaly
Extreme ultraviolet lithography: overview and development status
Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2005exaly

