Results 281 to 290 of about 43,392 (299)
Some of the next articles are maybe not open access.

Spectroscopy in the extreme ultraviolet on an electron beam ion trap

Review of Scientific Instruments, 1999
P Beiersdorfer   +2 more
exaly  

Extreme ultraviolet lithography: A review

Journal of Vacuum Science & Technology B, 2007
exaly  

Tabletop Lasers in the Extreme Ultraviolet

Optics and Photonics News, 2006
Henry C Kapteyn
exaly  

Resist pattern fluctuation limits in extreme-ultraviolet lithography

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1994
Taro Ogawa, Hiromasa Yamanashi
exaly  

Extreme ultraviolet lithography: overview and development status

Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2005
exaly  

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