Results 271 to 280 of about 43,392 (299)

A high resolution extreme ultraviolet spectrometer system optimized for harmonic spectroscopy and XUV beam analysis

Review of Scientific Instruments, 2019
Martin Wünsche, Silvio Fuchs, Jan Nathanael   +2 more
exaly  

Microscopy of extreme ultraviolet lithography masks with 132 nm tabletop laser illumination

Optics Letters, 2009
F Brizuela, Francesco Pedaci, W Chao
exaly  

Actinic detection of sub-100 nm defects on extreme ultraviolet lithography mask blanks

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1999
Seongtae Jeong, Edita Tejnil, James H Underwood   +2 more
exaly  

Extreme ultraviolet catastrophes

Nature Photonics, 2012
openaire   +1 more source

Structure and performance of Si/Mo multilayer mirrors for the extreme ultraviolet

Journal of Applied Physics, 1994
J M Slaughter, A Mirone, R N Watts
exaly  

Comparison of the lithographic properties of positive resists upon exposure to deep- and extreme-ultraviolet radiation

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1999
Robert L Brainard, Veena Rao
exaly  

Cold-plasma production for recombination extreme-ultraviolet lasers by optical-field-induced ionization

Journal of the Optical Society of America B: Optical Physics, 1989
N H Burnett, P B Corkum
exaly  

Investigation of Gd and Tb plasmas for beyond extreme ultraviolet lithography based on multilayer mirror performance

Applied Physics Letters, 2012
Bowen Li, Takamitsu Ōtsuka
exaly  

Lithography in the Deep Ultraviolet and Extreme Ultraviolet

2014
openaire   +1 more source

A comb in the extreme ultraviolet

Nature, 2012
openaire   +1 more source