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Femtosecond laser micromachining of silicon for MEMS
SPIE Proceedings, 2003Laser micromachining of n-type silicon wafer was studied using femtosecond laser operating at 400 and 800 nm wavelengths. The fundamental wavelength was used to fabricate a diaphragm of 4 mm diameter using a computer controlled galvo head. The laser pulsewidth was 110 fs, repetition rate of 1 kHz, and maximum average power of 2 W.
Mohammed El-Bandrawy, Mool C. Gupta
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Femtosecond Laser Micromachining in Transparent Materials
Advanced Photonics & Renewable Energy, 2010When femtosecond laser pulses are focused tightly into a transparent material, the intensity in the focal volume can become high enough to cause nonlinear absorption of laser energy. The absorption, in turn, can lead to permanent structural or chemical changes. Such changes can be used for micromachining bulk transparent materials. Applications include
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Femtosecond laser gratings micromachining on PDMS plates
2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009We report on the femtosecond laser miscromachining of diffraction gratings on PDMS (polydimethylsiloxane) plate. By scanning the planar PDMS plate, using the optical X-Y-Z stages, the embedded diffraction gratings in PDMS plate was fabricated successfully.
Linwei Zhu +3 more
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Biophotonic chips fabricated by femtosecond laser micromachining
2010 IEEE Photinic Society's 23rd Annual Meeting, 2010Femtosecond lasers are a very powerful tool for the fabrication of high-quality and directly-buried optical waveguides and microfluidic channels. This technology is employed for the integration of optical sensing in microfluidic devices. Results will be presented and potentials of this technology will be discussed.
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100-kHz diffraction-limited femtosecond laser micromachining
Applied Physics B, 2005We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to λ/15 peak–valley and λ/100 rms.
Sanner, Nicolas +5 more
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X-ray emission from femtosecond laser micromachining
Conference on Lasers and Electro-Optics (CLEO 2000). Technical Digest. Postconference Edition. TOPS Vol.39 (IEEE Cat. No.00CH37088), 2000Summary form only given. Ultrafast lasers are rapidly becoming important tools in the micromachining and microprocessing of solids. Extremely short laser light pulses in the femtosecond regime lead to qualitatively different interactions with solids compared with light pulses of much longer duration. Pulse energies from high-repetition-rate solid state
J. Thogersen +4 more
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Platinum micromachining using femtosecond laser pulses
Laser-based Micro- and Nanoprocessing XVI, 2022Luiz Eduardo Raphael da Rocha +3 more
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Cosmology with the Laser Interferometer Space Antenna
Living Reviews in Relativity, 2023Germano Nardini
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Pulsed Laser in Liquids Made Nanomaterials for Catalysis
Chemical Reviews, 2021Ryland C Forsythe, Astrid M Müller
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Laser Ablation–Inductively Coupled Plasma–Mass Spectrometry Imaging in Biology
Chemical Reviews, 2021Philip A Doble +2 more
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