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Femtosecond laser processing for optofluidic fabrication

Lab on a Chip, 2012
Femtosecond laser direct writing is a promising technique for fabricating optofluidic devices since it can modify the interior of glass in a spatially selective manner through multiphoton absorption. The chemical properties of laser-irradiated regions in glass are modified allowing them to be selectively etched by subsequent wet etching using aqueous ...
Koji, Sugioka, Ya, Cheng
openaire   +2 more sources

Studies of Femtosecond Laser-Processed Nitinol

Materials Science Forum, 2003
Processing of nickel-titanium alloys (Nitinol) using conventional machining technologies often degrades its mechanical properties due to thermal influence and mechanical tensions. In this paper, ultra-fine cutting of Nitinol using femtosecond laser was studied. Parametric investigations were performed to assess their effects on heat-affected-zone (HAZ),
Zheng, H. Y.   +3 more
openaire   +4 more sources

Liquidly process in femtosecond laser processing

Applied Surface Science, 2009
Abstract Nano-sized water-crown like structure in array was firstly generated on metallic thin film by interfering femtosecond laser processing. We named the structure as “nanocrown”. Ridges are standing on the edge of each ablated hole. The shapes of ridges are spike, nano-waterdrop and bead on column. The radius of the top of a spike was just 7 nm,
Yoshiki Nakata   +3 more
openaire   +1 more source

Processing of semiconductors with femtosecond lasers

SPIE Proceedings, 2002
Semiconductor materials are still the material of choice also in many microsystems applications. This is mainly justified by the availability of mature processes and equipment originally developed for microelectronics fabrication. However, for microsystems more flexible requirements have to be fulfilled and new tools have to be developed especially ...
Hans K. Toenshoff   +2 more
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Femtosecond laser for glass processing

Advanced Solid State Lasers, 2015
A compact and flexible femtosecond laser with pulse duration of ~400-fs and pulse energy up to 100 µJ is presented. The femtosecond laser source is applied to glass processing applications.
K. Mishchik   +6 more
openaire   +1 more source

IN-PROCESS MONITORING OF FEMTOSECOND LASER MATERIAL PROCESSING

International Journal of Nanoscience, 2005
Recent research and development on the femtosecond laser has shown that it is a powerful tool for high precision micromachining. However, the femtosecond laser-material interaction is fast and complex due to its ultrashort pulse duration. Consequently, it is not an easy task to optimize process parameters and to ensure high-quality fabrication.
Y. Z. DENG   +5 more
openaire   +1 more source

Femtosecond laser processing of materials

CLEO: 2014, 2014
We review recent work involving the interaction of femtosecond laser pulses with materials. We discuss the fundamental processes involved and applications, classifying the work into the interaction with transparent materials and with absorbing materials.
openaire   +1 more source

In-process debris removal in femtosecond laser processing

Applied Physics A, 2017
Debris deposited around laser-processed structures, which is a critical issue in high-precision laser processing, should be removed. A new method for laser cleaning of debris was developed. A glass surface was irradiated with a line-focused beam for laser cleaning, together with a focused beam for laser processing.
Tetsuya Abe   +4 more
openaire   +1 more source

Holographic femtosecond laser processing

SPIE Proceedings, 2010
Parallel femtosecond laser processing using a computer-generated hologram (CGH) displayed on a spatial light modulator, called holographic femtosecond laser processing, has advantages of high throughput and high light-use efficiency of the laser pulse energy.
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Fundamentals of Femtosecond Laser Processing

2013
Femtosecond lasers have excellent characteristics for materials processing due to their ultrashort pulse widths and extremely high peak powers. When a femtosecond laser beam with a moderate pulse energy is focused into glass, multiphoton absorption or tunneling ionization is confined to a region near the focal point inside the glass. Femtosecond lasers
Koji Sugioka, Ya Cheng
openaire   +1 more source

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