Results 71 to 80 of about 9,001 (256)
Stacked Integration of MEMS on LSI
Micromachines, 2016 Two stacked integration methods have been developed to enable advanced microsystems of microelectromechanical systems (MEMS) on large scale integration (LSI). One is a wafer level transfer of MEMS fabricated on a carrier wafer to a LSI wafer.
Masayoshi Esashi, Shuji Tanaka
doaj +1 more source
Resonant Ultrasonic Particle Manipulators and their Applications in Sensor Systems
, 2004 The paper describes the use of ultrasonic standing waves as bulk acoustic wave actuators, exploiting the acoustic radiation forces within the standing wave to move biological cells or other particles.
Harris, N.R. +3 more
core +1 more source
Recent Advances of Slip Sensors for Smart Robotics
Advanced Materials Technologies, EarlyView.This review summarizes recent progress in robotic slip sensors across mechanical, electrical, thermal, optical, magnetic, and acoustic mechanisms, offering a comprehensive reference for the selection of slip sensors in robotic applications. In addition, current challenges and emerging trends are identified to advance the development of robust, adaptive,
Xingyu Zhang +8 more
wiley +1 more source
Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor
Nanophotonics, 2021 Cointegration and coupling a perfect metamaterial absorber (PMA) together with a film bulk acoustic wave resonator (FBAR) in a monolithic fashion is introduced for the purpose of producing ultracompact uncooled infrared sensors of high sensitivity.
Tao Jin +10 more
doaj +1 more source
Advanced Materials Technologies, EarlyView.Flexible piezopolymer ultrasound transducers are engineered by tailoring the electrode–piezopolymer interface using metallic, flake‐based, and porous graphene electrodes. Laser‐induced graphene's porous structure enables polymer infiltration, strengthening interfacial coupling and enhancing piezoelectric response and acoustic output.
Spencer Hagen +3 more
wiley +1 more source
Design and Analysis of Wideband Ladder-Type Film Bulk Acoustic Wave Resonator Filters in Ku-Band
Active and Passive Electronic Components, 2013 This paper presents the design of ladder-type filters based on film bulk acoustic wave resonator (FBAR) in Ku-band. The proposed FBAR filter has an insertion loss of −3 dB, out-of-band rejection of −12 dB and 3 dB bandwidth of 1.0 GHz from 15 GHz to 16 ...
N. Izza M. Nor +3 more
doaj +1 more source
Surface acoustic wave resonators on thin film piezoelectric substrates in the quantum regime
Materials for Quantum Technology, 2023 Lithium niobate (LNO) is a well established material for surface acoustic wave (SAW) devices including resonators, delay lines and filters. Recently, multi-layer substrates based on LNO thin films have become commercially available.
Thomas Luschmann +8 more
doaj +1 more source
Prospects for quantum acoustics with phononic crystal devices
, 2016 Nanomechanical systems made from phononic crystals can act as highly coherent microwave-frequency circuits at cryogenic temperatures. However, generating sufficient coupling between these devices and microwave superconducting quantum circuits is ...
Arrangoiz-Arriola, Patricio +1 more
core +1 more source
Modulus‐Switchable Miniature Robots for Biomedical Applications: A Review
Advanced Robotics Research, EarlyView.Materials, robot designs, proof‐of‐concept functions, and biomedical applications of modulus‐switchable miniature robots. Miniature soft robots have shown great potential in biomedical applications due to their excellent controllability and suitable mechanical properties in biological environments.
Chunyun Wei, Yibin Wang, Jiangfan Yu
wiley +1 more source
Shock and Vibration, 2022 Measurement of a volatile solution is essential for laboratory safety and hospital clinic safety. In this paper, we present an ethanol-sensing and acetone-sensing device using an AlN piezoelectric material-based film bulk acoustic resonator (FBAR).
Jieyi Zhu, Meiyan Feng, Guofu Lian
doaj +1 more source