In situ growth optimization in focused electron-beam induced deposition. [PDF]
Beilstein J Nanotechnol, 2013 We present the application of an evolutionary genetic algorithm for the in situ optimization of nanostructures that are prepared by focused electron-beam-induced deposition (FEBID).
Weirich PM +3 more
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Focused electron beam induced deposition: A perspective. [PDF]
Beilstein J Nanotechnol, 2012 Background: Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface
Huth M +7 more
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Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition. [PDF]
Beilstein J Nanotechnol, 2015 Platinum–carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature.
Lewis BB +5 more
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Combined Focused Electron Beam-Induced Deposition and Etching for the Patterning of Dense Lines without Interconnecting Material. [PDF]
Micromachines (Basel), 2020 High resolution dense lines patterned by focused electron beam-induced deposition (FEBID) have been demonstrated to be promising for lithography. One of the challenges is the presence of interconnecting material, which is often carbonaceous, between the ...
Hari S +4 more
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Modelling focused electron beam induced deposition beyond Langmuir adsorption. [PDF]
Beilstein J Nanotechnol, 2017 In this work, the continuum model for focused electron beam induced deposition (FEBID) is generalized to account for multilayer adsorption processes.
Sanz-Hernández D, Fernández-Pacheco A.
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Correction: Modelling focused electron beam induced deposition beyond Langmuir adsorption. [PDF]
Beilstein J Nanotechnol, 2017 [This corrects the article DOI: 10.3762/bjnano.8.214.].
Sanz-Hernández D, Fernández-Pacheco A.
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The role of electron-stimulated desorption in focused electron beam induced deposition. [PDF]
Beilstein J Nanotechnol, 2013 We present the results of our study about the deposition rate of focused electron beam induced processing (FEBIP) as a function of the substrate temperature with the substrate being an electron-transparent amorphous carbon membrane.
van Dorp WF +3 more
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Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition. [PDF]
Beilstein J Nanotechnol, 2021 Seven gold(I) N-heterocyclic carbene (NHC) complexes were synthesized, characterized, and identified as suitable precursors for focused electron beam-induced deposition (FEBID).
Glessi C, Mahgoub A, Hagen CW, Tilset M.
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Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition. [PDF]
Nanomaterials (Basel), 2023 Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution.
Jurczyk J +8 more
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Low-resistivity, high-resolution W-C electrical contacts fabricated by direct-write focused electron beam induced deposition. [PDF]
Open Res Eur, 2022 Background: The use of a focused ion beam to decompose a precursor gas and produce a metallic deposit is a widespread nanolithographic technique named focused ion beam induced deposition (FIBID).
Orús P +3 more
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