Controlled nano-patterning using focused electron beam induced deposition
2023ImPhys/Hagen ...
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Electron range effects in focused electron beam induced deposition of 3D nanostructures
Microelectronic Engineering, 2006We present evidence that the penetration of electrons in solids, typically a few micrometers at the usual acceleration voltages used in electron microscopes, influences the shape of sub-microstructures created by focused electron beam induced deposition.
Tristan Bret +4 more
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Substrate atom enriched carbon nanostructures fabricated by focused electron beam induced deposition
Nanotechnology, 2008Carbon nanostructures fabricated using focused electron beam induced deposition (FEBID) in a residual vacuum atmosphere or in the presence of low pressure precursor gas exhibit enrichment with the atoms of the substrate element. Nanostructures having base sizes up to 100 nm and height up to 250 nm with maximum substrate atom enrichment of 50% have been
Sarvesh K, Tripathi +2 more
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Direct-Write Deposition and Focused-Electron-Beam-Induced Purification of Gold Nanostructures
ACS Applied Materials & Interfaces, 2015Three-dimensional gold (Au) nanostructures offer promise in nanoplasmonics, biomedical applications, electrochemical sensing and as contacts for carbon-based electronics. Direct-write techniques such as focused-electron-beam-induced deposition (FEBID) can provide such precisely patterned nanostructures.
Belić, Domagoj +5 more
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Sub-10 nm focused electron beam induced deposition
2008Work started with a critical review of literature from the past 70-odd years. The review shows that the physical processes occurring in EBID are generally well understood. By combining models for electron scattering in a solid and electron beam induced heating and knowledge of growth regimes, the majority of the experimental results was explained ...
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Ferromagnetic Cobalt Nanostructures Grown by Focused Electron Beam Induced Deposition
2013In this chapter we present the fabrication and characterization of Co nanodeposits, showing that varying the growth parameters such as the electron current, the beam accelerating voltage, the precursor flow, and the substrate temperature has significant impact on subsequent magnetic properties.
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Focused electron beam induced deposition of pure SIO 2
SPIE Proceedings, 2007Alexandre Perentes +2 more
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Magnetic nanowires grown by focused electron beam-induced deposition
2015A. Fernández-Pacheco +4 more
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Focused Electron Beam Induced Deposition of Pure Silica
Lassaad Ajili, Patrik Hoffmannopenaire +1 more source
Functional Nanostructures Fabricated by Focused Electron/Ion Beam Induced Deposition
2014openaire +1 more source