Room Temperature Direct Electron Beam Lithography in a Condensed Copper Carboxylate
Micromachines, 2021 High-resolution metallic nanostructures can be fabricated with multistep processes, such as electron beam lithography or ice lithography. The gas-assisted direct-write technique known as focused electron beam induced deposition (FEBID) is more versatile ...
Luisa Berger +5 more
doaj +1 more source
Direct-write single electron transistors by focused electron beam induced deposition
Nano Futures, 2019 Giorgia Di Prima +4 more
openaire +2 more sources
Review of magnetic nanostructures grown by focused electron beam induced deposition (FEBID) [PDF]
, 2016 We review the current status of the use of focused electron beam induced deposition (FEBID) for the growth of magnetic nanostructures. This technique relies on the local dissociation of a precursor gas by means of an electron beam.
Córdoba, R +5 more
core +3 more sources
Micromachines, 2019 In this contribution, we compare the performance of Focused Electron Beam-induced Deposition (FEBID) and Focused Ion Beam-induced Deposition (FIBID) at room temperature and under cryogenic conditions (the prefix “Cryo” is used here for ...
José María De Teresa +3 more
doaj +1 more source
Simulation of structural and electronic properties of amorphous tungsten oxycarbides [PDF]
, 2012 Electron beam induced deposition with tungsten hexacarbonyl W(CO)6 as precursors leads to granular deposits with varying compositions of tungsten, carbon and oxygen. Depending on the deposition conditions, the deposits are insulating or metallic.
Harald O Jeschke +6 more
core +2 more sources
Fluxonic Properties of Vortices in a Washboard Pinning Potential Fabricated by Focused Particle Beam Techniques [PDF]
, 2012 A challenging aspect of the usage of patterned nanostructures relates to the development of superconducting devices operating with the Abrikosov vortices in some pinning potential.
Dobrovolskiy, O.V. +2 more
core +1 more source
Fundamental edge broadening effects during focused electron beam induced nanosynthesis
Beilstein Journal of Nanotechnology, 2015 The present study explores lateral broadening effects of 3D structures fabricated through focused electron beam induced deposition using MeCpPt(IV)Me3 precursor.
Roland Schmied +4 more
doaj +1 more source
Mechanical magnetometry of Cobalt nanospheres deposited by focused electron beam at the tip of ultra-soft cantilevers [PDF]
, 2014 Using focused-electron-beam-induced deposition, Cobalt magnetic nanospheres with diameter ranging between 100 nm and 300 nm are grown at the tip of ultra-soft cantilevers.
De Loubens, Grégoire +5 more
core +4 more sources
Resolution in Focused Electron- and Ion-Beam Induced Chemical Vapor Deposition
, 2007 The key physical processes governing resolution of focused electron-beam and ion-beam-assisted chemical vapor deposition are analyzed via an adsorption rate model.
Danelon +9 more
core +1 more source
A novel copper precursor for electron beam induced deposition [PDF]
, 2018 A fluorine free copper precursor, Cu(tbaoac)2 with the chemical sum formula CuC16O6H26 is introduced for focused electron beam induced deposition (FEBID).
Christiansen, Silke +6 more
core +2 more sources