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Physical and Electrical Characterization of Hafnium Oxide and Hafnium Silicate Sputtered Films
Journal of Applied Physics, 2001A Callegari, M Gribelyuk, T Zabel
exaly
Nanolaminates of hafnium oxide and zirconium oxide
2012AHN KIE Y, FORBES LEONARD
openaire +1 more source
Ultra high-k hafnium oxide and hafnium zirconium oxide films
KASHYAP HARSHIL +5 moreopenaire +1 more source
Hafnium Amide Complex Manufacturing Method and Hafnium-Containing Oxide Film
2011RYOKAWA ATSUSHI, YAMADA SHUHEI
openaire +2 more sources

