Results 231 to 240 of about 821,355 (285)
Some of the next articles are maybe not open access.

Related searches:

Thermal Atomic Layer Etching of Amorphous and Crystalline Hafnium Oxide, Zirconium Oxide, and Hafnium Zirconium Oxide

2019 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA), 2019
Thermal atomic layer etching (ALE) using the fluorination and ligand-exchange mechanism was employed to etch amorphous and crystalline films of hafnium oxide, zirconium oxide, and hafnium zirconium oxide. HF was the fluorination reactant and dimethylaluminum chloride (DMAC) or titanium tetrachloride was the metal precursor for ligand-exchange.
Steven George, Jessica Murdzek
exaly   +2 more sources

Thermodynamics of oxidation of zirconium and hafnium borides

Russian Journal of Inorganic Chemistry, 2016
Gibbs thermodynamic potentials of oxidation of zirconium and hafnium diborides with molecular and atomic oxygen and nitrogen monoxide were calculated for a temperature range of 20–2500°C. Oxidation of zirconium and hafnium borides with atomic oxygen was found to be the most expected reaction.
V. Z. Poilov, E. N. Pryamilova
exaly   +2 more sources

New Precursors for the CVD of Zirconium and Hafnium Oxide Films

Chemical Vapor Deposition, 2006
Alternatives to tetrakis(dialkylamido)zirconium and hafnium for use as precursors to zirconium and hafnium oxide films are examined. Tetrakis(trimethylhydrazido)zirconium and hafnium, Zr(NMeNMe 2 ) 4 and Hf(NMeNMe 2 ) 4 , and Hf[ t BUNCH 2 CH 2 N- t Bu] 2 are used with oxygen as precursors to zirconium and hafnium oxide films in a low-pressure CVD ...
J.-S. M. Lehn   +2 more
exaly   +2 more sources

Impact of Ferroelectric Layer Thickness on Reliability of Back‐End‐of‐Line‐Compatible Hafnium Zirconium Oxide Films

open access: yesAdvanced Engineering Materials, 2023
Due to its ferroelectricity, hafnium oxide has attracted a lot of attention for ferroelectric memory devices. Amongst different dopant elements, zirconium is found to be beneficial due to the relatively low crystallization temperature of hafnium ...
Ayse Sunbul
exaly   +2 more sources

Oxidation of Titanium, Zirconium, and Hafnium

Journal of The Electrochemical Society, 1959
A metallographic study of the high-temperature oxidation of titanium, zirconium, and hafaium has showa that alterations in the rate equations relating to such processes may be associated with the establishment of oxygen diffusion gradienis in the surface layers of the metal.
G. R. Wallwork, A. E. Jenkins
openaire   +1 more source

Charge transport in thin hafnium and zirconium oxide films

Optoelectronics, Instrumentation and Data Processing, 2017
Albert Chin   +2 more
exaly   +2 more sources

Zirconium and Hafnium Twin Monomers for Mixed Oxides

ChemPlusChem, 2014
AbstractThe synthesis of Zr and Hf twin monomers of type [M(2‐OCH2cC4H3O)4(x HOCH2cC4H3O)] (3, M=Zr, x=0; 4, M=Hf, x=1) and M[(2‐OCH2‐C6H4O)2(2‐HOCH2‐C6H4OH)] (5, M=Zr; 6, M=Hf) by reacting M(OR)4 (M=Zr, R=nC3H7, 1; M=Hf, R=nC4H9, 2) with 2‐furylmethanol or 2‐hydroxybenzyl alcohol is discussed. Complexes 3–6 were homopolymerized under acidic conditions.
Christian, Schliebe   +7 more
openaire   +2 more sources

Home - About - Disclaimer - Privacy