Results 201 to 206 of about 2,614 (206)

Hydrogen Silsesquioxane (HSQ) Etching Resistance Dependence on Substrate During Dry Etching

Physica Status Solidi (A) Applications and Materials Science, 2019
Kazy Shariar, Guangyang Lin, Peng Cui
exaly  

Влияние температуры проявления на контраст электронного резиста HSQ

Микроэлектроника, 2020
openaire   +1 more source

Investigation of the low dielectric siloxane-based hydrogen silsesquioxane (HSQ) as passivation layer on TFT-LCD

Thin Solid Films, 2007
Po-Tsun Liu
exaly  

High resolution HSQ nanopillar arrays with low energy electron beam lithography

Microelectronic Engineering, 2013
F Carcenac, Guilhem Larrieu
exaly  

Realization of ultra-thin HSQ resist layer for high resolution electron beam lithography using liquid splitting process

Microelectronic Engineering, 2014
Jens Bolten, Heinrich Kurz
exaly  

Tests sur la HSQ en poudre de EMResist

2023
Deblock, Yves, Boyaval, Christophe, Elegbe, J., Ouendi, Saliha, Tilmant, Pascal, Vaurette, Francois   +5 more
openaire   +1 more source