Results 191 to 200 of about 2,614 (206)

HSQ

2014
openaire   +2 more sources

Nanoimprint lithography using hydrogen silsequioxane(HSQ) mold

Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004., 2004
M. Kawamori, K. Nakamatsu, K. Tone, T. Katase, H. Namatsu, S. Matsui   +5 more
openaire   +1 more source

Enhancing the resistance of low-k hydrogen silsesquioxane (HSQ) to wet stripper damage

Thin Solid Films, 2001
Po-Tsun Liu, T M Tsai, C W Chen
exaly  

Electron beam lithography of HSQ/PMMA bilayer resists for negative tone lift-off process

Microelectronic Engineering, 2008
Changzhi Gu
exaly  

HSQ

2011
openaire   +1 more source

Repairing plasma-damaged low-k HSQ films with trimethylchlorosilane treatment

Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 2006
S K Singh, R O Dusane
exaly  

20nm Line/space patterns in HSQ fabricated by EUV interference lithography

Microelectronic Engineering, 2007
Yasin Ekinci, Harun H Solak, Celestino Padeste   +2 more
exaly  

Improving the adhesion of hydrogen silsesquioxane (HSQ) onto various substrates for electron-beam lithography by surface chemical modification

Microelectronic Engineering, 2014
Zhiqiang Zhang, Huigao Duan, Yihui Wu
exaly  

HSQ – Health Status Questionnaire

2014
openaire   +1 more source

Ultra-dense hydrogen silsesquioxane (HSQ) structures on thin silicon nitride membranes

Microelectronic Engineering, 2009
Sookyung Choi, Ilesanmi Adesida
exaly