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A Planar Integrated Micro-mass Spectrometer

2012
A planar fully integrated micro-mass spectrometer fabricated in a full wafer based state-of-the-art MEMS technology in a glass–silicon–glass sandwich is presented. Within a volume of 7 × 10 × 1.3 mm³ it contains all components of a mass spectrometer, i.e., a microwave plasma electron source for ionization, an ionization chamber, the electron and ion ...
Jörg Müller   +4 more
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Design of a hybrid integrated microfiber spectrometer

Journal of Micro/Nanolithography, MEMS, and MOEMS, 2003
A scheme of a novel hybrid integrated microspectrometer is proposed, which greatly reduces the number of optical units used in the system and easily realizes the integration of the optical unit and the detecting array. At the same time, the effective area of the grating increases. One model of such device is fabricated.
openaire   +1 more source

Integrated Spectrometers for Lab-on-a-Chip Devices

2013
Miniaturization of spectrometers for microfluidic applications is currently an intense area of research. This thesis is devoted to the design, fabrication, and testing of a planar optical microspectrometer. Optical microspectrometers are potentially important candidates for noninvasive detection and identification of cells and other biological material.
openaire   +1 more source

First results of the INTEGRAL spectrometer SPI

New Astronomy Reviews, 2004
Abstract This paper presents first results obtained by the SPI telescope aboard the INTEGRAL γ-ray observatory. Science highlights comprise the rapid localisation and observation of γ-ray bursts, high-resolution spectroscopy of compact objects, the determination of the morphology and spectral shape of the galactic 511 keV positron annihilation line ...
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Integral Field Spectrometer

2015
Bernhard R. Brandl   +2 more
openaire   +1 more source

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