Humidity Sensors with Shielding Electrode Under Interdigitated Electrode [PDF]
Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI).
Hong Liu +6 more
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Characterisation of nano-interdigitated electrodes [PDF]
Interdigitated electrodes made up of two individually addressable interdigitated comb-like electrode structures have frequently been suggested as ultra sensitive electrochemical biosensors. Since the signal enhancement effects due to cycling of the reduced and oxidized species are strongly dependent on the inter electrode distances, since the nature of
L H D Skjolding +4 more
openaire +1 more source
A Flow-Through Microfluidic Relative Permittivity Sensor
In this paper, we present the design, simulation, fabrication and characterization of a microfluidic relative permittivity sensor in which the fluid flows through an interdigitated electrode structure.
Yaxiang Zeng +3 more
doaj +1 more source
Liquid Metal Interdigitated Capacitive Strain Sensor with Normal Stress Insensitivity
Soft and stretchable sensors of strain are important for human–machine interfaces, soft robotics, and electronic skins. However, soft strain sensors generally cannot distinguish in‐plane strain from normal stress.
Dongguang Zhang +5 more
doaj +1 more source
Micromachined Planar Supercapacitor with Interdigital Buckypaper Electrodes [PDF]
In this work, a flexible micro-supercapacitor with interdigital planar buckypaper electrodes is presented. A simple fabrication process involving vacuum filtration method and SU-8 molding techniques is proposed to fabricate in-plane interdigital buckypaper electrodes on a membrane filter substrate.
Chen, Yun-Ting +3 more
openaire +3 more sources
Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process
The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 µm complementary metal oxide semiconductor (CMOS) process. The sensor consists of a
Wei-Zhen Liao +2 more
doaj +1 more source
A Microfabricated 4-Electrode Conductivity Sensor with Enhanced Range
Conductivity is a routinely measured parameter to assess impurities in water. Changing the geometry from parallel plate electrodes to planar microfabricated dual-band or interdigitated electrodes, these sensors could be miniaturized.
Greja J. A. M. Brom-Verheijden +2 more
doaj +1 more source
Graphene Nanogap Interdigitated Asymmetric Electrodes for Photodetection
This work proposes a high-performance asymmetric gold/graphene/platinum photodetector. The new photodetector, operating without bias, integrates interdigitated 100 nm spaced metallic contacts that induce a built-in potential and a short carrier path ...
Rabiaa Elkarous +6 more
doaj +1 more source
Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro -mechanical system (MEMS) technique are investigated.
Ming-Zhi Yang, Ching-Liang Dai
doaj +1 more source
Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented.
Chien-Fu Fong +2 more
doaj +1 more source

