Humidity Sensors with Shielding Electrode Under Interdigitated Electrode [PDF]
Sensors, 2019 Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI).
Hong Liu +6 more
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Micromachined Planar Supercapacitor with Interdigital Buckypaper Electrodes [PDF]
Micromachines, 2018 In this work, a flexible micro-supercapacitor with interdigital planar buckypaper electrodes is presented. A simple fabrication process involving vacuum filtration method and SU-8 molding techniques is proposed to fabricate in-plane interdigital buckypaper electrodes on a membrane filter substrate.
Yun-Ting Chen +3 more
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A Flow-Through Microfluidic Relative Permittivity Sensor
Micromachines, 2020 In this paper, we present the design, simulation, fabrication and characterization of a microfluidic relative permittivity sensor in which the fluid flows through an interdigitated electrode structure.
Yaxiang Zeng +3 more
doaj +1 more source
Liquid Metal Interdigitated Capacitive Strain Sensor with Normal Stress Insensitivity
Advanced Intelligent Systems, 2022 Soft and stretchable sensors of strain are important for human–machine interfaces, soft robotics, and electronic skins. However, soft strain sensors generally cannot distinguish in‐plane strain from normal stress.
Dongguang Zhang +5 more
doaj +1 more source
Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process
Sensors, 2013 The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 µm complementary metal oxide semiconductor (CMOS) process. The sensor consists of a
Wei-Zhen Liao +2 more
doaj +1 more source
Constitutive Equations of Piezoelectric Layered Beams With Interdigitated Electrodes [PDF]
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2018 This paper establishes the constitutive equations, or linear two-port models, of piezoelectric layered beams with interdigital electrodes (IDEs). The effect of the nontrivial field on the transduction is analyzed. Based on conformal mapping techniques, we derive new analytic expressions for the capacitance, the electric field, and the electromechanical
Cuong H. Nguyen +2 more
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A Microfabricated 4-Electrode Conductivity Sensor with Enhanced Range
Proceedings, 2018 Conductivity is a routinely measured parameter to assess impurities in water. Changing the geometry from parallel plate electrodes to planar microfabricated dual-band or interdigitated electrodes, these sensors could be miniaturized.
Greja J. A. M. Brom-Verheijden +2 more
doaj +1 more source
Structure modification of 0–3 piezoelectric ceramic/polymer composites through dielectrophoresis [PDF]
, 2005 Anisotropic material properties can be induced in ceramic/polymer composites by applying an alternating electric field of moderate strength during processing.
Wilson, Stephen +5 more
core +1 more source
Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
Sensors, 2015 The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro -mechanical system (MEMS) technique are investigated.
Ming-Zhi Yang, Ching-Liang Dai
doaj +1 more source
Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
Sensors, 2015 A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented.
Chien-Fu Fong +2 more
doaj +1 more source