Performance of a Low Energy Ion Source with Carbon Nanotube Electron Emitters under the Influence of Various Operating Gases [PDF]
Nanomaterials, 2020 Low energy ion measurements in the vicinity of a comet have provided us with important information about the planet’s evolution. The calibration of instruments for thermal ions in the laboratory plays a crucial role when analysing data from in-situ
Huzhong Zhang +6 more
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Cathode Design Optimization toward the Wide-Pressure-Range Miniature Discharge Ion Source for a Vacuum Micropump [PDF]
Sensors, 2019 It is difficult to generate and maintain the vacuum level in vacuum MEMS (Micro-Electro-Mechanical Systems) devices. Currently, there is still no single method or device capable of generating and maintaining the desired vacuum level in a vacuum device ...
Tongtong Yao +3 more
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Development and Evaluation of Ferrite Core Inductively Coupled Plasma Radio Frequency Ion Source for High-Current Ion Implanters in Semiconductor Applications [PDF]
SensorsThis study presents the development of a ferrite core inductively coupled plasma (ICP) radio frequency (RF) ion source designed to improve the lifetime of ion sources in commercial ion implanters.
Jong-Jin Hwang +2 more
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Design, Fabrication and Mass-spectrometric Studies of a Micro Ion Source for High-Field Asymmetric Waveform Ion Mobility Spectrometry [PDF]
Micromachines, 2019 A needle-to-cylinder electrode, adopted as an ion source for high-field asymmetric ion mobility spectrometry (FAIMS), is designed and fabricated by lithographie, galvanoformung and abformung (LIGA) technology.
Hua Li +6 more
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Focused ion beam-induced platinum deposition with a low-temperature cesium ion source [PDF]
Beilstein Journal of NanotechnologyIn addition to precise milling, the deposition of material at a specific location on a sample surface is a frequently used process of focused ion beam (FIB) systems.
Thomas Henning Loeber +5 more
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An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology [PDF]
Sensors, 2017 The injection and ionization of volatile organic compounds (VOA) by an integrated chip is experimentally analyzed in this paper. The integrated chip consists of a needle-to-cylinder electrode mounting on the Polymethyl Methacrylate (PMMA) substrate.
Hua Li +5 more
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Tin–Lead Liquid Metal Alloy Source for Focused Ion Beams [PDF]
MicromachinesFocused Ion Beam (FIB) systems are increasingly utilized in nanotechnology for nanostructuring, surface modification, doping, and rapid prototyping.
Bryan Flores +6 more
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Ion Source—Thermal and Thermomechanical Simulation
Aerospace, 2021 The main purpose of this work is to conduct ground development testing of the ion source intended for use the space debris contactless transportation system.
Victoria V. Svotina +2 more
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Negative Hydrogen Ion Sources for Fusion: From Plasma Generation to Beam Properties
Frontiers in Physics, 2021 The neutral beam injection systems for the international fusion experiment ITER used for heating, current drive, and diagnostic purposes are based on RF-driven negative hydrogen ion sources with a source area of roughly 0.9 m × 1.9 m. The sources operate
U. Fantz +4 more
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St. Petersburg Polytechnical University Journal: Physics and Mathematics, 2023 In this work, a charged particle beam transport in an ion source with a corona discharge, the source being equipped with a focusing system based on thin diaphragms in the standing gas and at atmospheric pressure, has been studied experimentally.
Pomozov Timofey +2 more
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