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The 100‐kV Gas and Metal Ion Source for High Current Ion Implantation
Review of Scientific Instruments, 1992Peter Schanin, Efim Oks, Alexey Nikolaev
exaly
Miniature High Current Metal Ion Source
Applied Physics Letters, 1986R A Macgill, I G Brown, J E Galvin
exaly
Magnetic field sources for an ion source
2014HAHTO SAMI K, HAMAMOTO NARIAKI
openaire +2 more sources
Ion source and a method of generating an ion beam using an ion source
2012RYDING GEOFFREY +3 more
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PLASMA SOURCE, ION SOURCE AND METHOD OF ION GENERATION
2006KASAMA YASUHIKO +2 more
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