Results 271 to 280 of about 305,677 (306)

Microwave ion source for ion implantation

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
Abstract Fundamentals of microwave ion sources used for ion implantation as well as their main features are reviewed and evaluated. Ion sources using plasmas generated by microwave discharge in a magnetic field have many advantageous features. Since they operate even with reactive source materials, they can provide long-life stable ion beams for a ...
openaire   +1 more source

Ion Source Electronics and Microwave Generators for Ion Sources

2017
H. Horneff, F. Bourg
openaire   +1 more source

Ion source

Vacuum, 1967
openaire   +2 more sources

An INTRODUCTION TO ION SOURCES

1984
openaire   +1 more source

Liquid metal alloy ion sources—An alternative for focussed ion beam technology

Applied Physics Reviews, 2016
L Bischoff, Paul Mazarov, L Bruchhaus
exaly  

Results and interpretation of high frequency experiments at 28 GHz in ECR ion sources, future prospects

Review of Scientific Instruments, 2002
D Hitz, G Melin, S Gammino
exaly  

Negative‐ion plasma sources

Review of Scientific Instruments, 1988
D P Sheehan, N Rynn, Sheehan D P
exaly  

ION SOURCES

1993
Haseroth, Helmut, Hora, Heinrich
openaire   +2 more sources

Multicusp ion sources (invited)

Review of Scientific Instruments, 1994
K N Leung, Leung K N
exaly  

Positive and negative ion sources for magnetic fusion

IEEE Transactions on Plasma Science, 2005
R S Hemsworth
exaly