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Femtosecond Laser Micromachining
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Effect of Ambient Pressure and Pulse Shaping on Femtosecond Laser Drilling of GDP Films. [PDF]
Wang Q, Zhang X, Hu Z.
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Advances in Morphology Control of Through-Glass via Wet Etching for High-Performance Glass-Based Packaging. [PDF]
Zhang Q, Liu H.
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Performance Optimization of Novel Laser Hybrid Ultrasonic Vibration Assisted Micro Milling for Inconel 718. [PDF]
Tehami AW +7 more
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Water-Soluble, Enzyme-Degradable, and Hydrolyzable STAR Particles for Enhanced Drug Delivery to Skin. [PDF]
Sadeqi A +2 more
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Tailoring Superwettability Through Bioinspired Reentrant Microstructures. [PDF]
Zhou Y +7 more
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Fabrication of Three-Dimensional Microstructures on SiC Substrates by Using 355 nm Nanosecond Lasers: Process Control and Morphology Evolution. [PDF]
Tsai HY +4 more
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An Investigation of Femtosecond Laser Micromachining
2005 International Conference on MEMS,NANO and Smart Systems, 2006Femtosecond laser micromachining is a new approach emerging in MEMS area in recent years. Although some applications have been reported, this technology is still not matured and not understood very well. Femtosecond lasers currently show much promise as potential effective tools in micromachining or micro-system applications, which include industrial ...
Ming Xia, Yiliu Tu
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