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Advances in silicon carbide pressure sensors for high-temperature extreme environment sensing. [PDF]

open access: yesMicrosyst Nanoeng
Wu C   +12 more
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Laser micromachining for packaging

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Braud, Flavie   +8 more
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Micromachining by lasers

Conference on Lasers and Electro-Optics Europe, 1994
The continually increasing demand for miniaturisation in the fields of electronics, micro-system-technology, and microoptics leads to higher and higher requirements for micromachining tools. Lasers are ideal for micromachining of metals, ceramics, and polymers.
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An Investigation of Femtosecond Laser Micromachining

2005 International Conference on MEMS,NANO and Smart Systems, 2006
Femtosecond laser micromachining is a new approach emerging in MEMS area in recent years. Although some applications have been reported, this technology is still not matured and not understood very well. Femtosecond lasers currently show much promise as potential effective tools in micromachining or micro-system applications, which include industrial ...
Ming Xia, Yiliu Tu
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