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Study on immersion waterjet assisted laser micromachining process [PDF]
Journal of Materials Processing Technology, 2018 The heat affected zone (HAZ), recast layer, and taper angle are the issues remained to be addressed in laser micromachining. In immersion waterjet assisted laser micromachining (IWALM) the waterjet flushes the ablated materials, plasma, and micro bubbles
Yufeng Wang, Guangyi Zhang
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An Investigation of Femtosecond Laser Micromachining
2005 International Conference on MEMS,NANO and Smart Systems, 2006Femtosecond laser micromachining is a new approach emerging in MEMS area in recent years. Although some applications have been reported, this technology is still not matured and not understood very well. Femtosecond lasers currently show much promise as potential effective tools in micromachining or micro-system applications, which include industrial ...
Ming Xia, Yiliu Tu
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Conference on Lasers and Electro-Optics Europe, 1994
The continually increasing demand for miniaturisation in the fields of electronics, micro-system-technology, and microoptics leads to higher and higher requirements for micromachining tools. Lasers are ideal for micromachining of metals, ceramics, and polymers.
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The continually increasing demand for miniaturisation in the fields of electronics, micro-system-technology, and microoptics leads to higher and higher requirements for micromachining tools. Lasers are ideal for micromachining of metals, ceramics, and polymers.
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Laser micromachining of goldblack coatings
Applied Optics, 2006Goldblack deposits have been used as high-absorption coatings for thermal infrared detectors for a number of years, principally on large single, or few pixel detectors. We present a new technique that allows the benefits of goldblack to be applied to the current generation of small pixel silicon micromachined thermal infrared detectors.
N, Nelms, J, Dowson, N, Rizvi, T, Rohr
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Advanced Materials for Optics and Electronics, 1993
AbstractThe machining of several materials such as polymers, metals and ceramics using excimer lasers (193, 248 and 308 nm) was investigated. By photoablation, micrometer resolution can be achieved for polymers if the wavelength and fluence are chosen properly. High‐definition processing of metals is complicated by the occurrence of surface melting. An
J. Ihlemann +2 more
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AbstractThe machining of several materials such as polymers, metals and ceramics using excimer lasers (193, 248 and 308 nm) was investigated. By photoablation, micrometer resolution can be achieved for polymers if the wavelength and fluence are chosen properly. High‐definition processing of metals is complicated by the occurrence of surface melting. An
J. Ihlemann +2 more
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Medical device technology, 2003
Laser micromachining can be the key to further miniaturisation of devices. This article describes the different techniques for precision removal of material.
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Laser micromachining can be the key to further miniaturisation of devices. This article describes the different techniques for precision removal of material.
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Trends in laser micromachining
SPIE Proceedings, 2016Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of
Frank Gaebler +2 more
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Picosecond lasers in micromachining
ICALEO 2003: 22nd International Congress on Laser Materials Processing and Laser Microfabrication, 2003Recent improvements to mode-locked lasers with picosecond pulse duration have fueled an increased interest for industrial applications, especially micromachining. Short pulses offer advantages for ablation of various materials. Reduced thermal load, low ablation threshold and other advantages of shorter pulses need to be tested for real application.
Gediminas Račiukaitis +3 more
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