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Laser micromachining for packaging

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Braud, Flavie   +8 more
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An Investigation of Femtosecond Laser Micromachining

2005 International Conference on MEMS,NANO and Smart Systems, 2006
Femtosecond laser micromachining is a new approach emerging in MEMS area in recent years. Although some applications have been reported, this technology is still not matured and not understood very well. Femtosecond lasers currently show much promise as potential effective tools in micromachining or micro-system applications, which include industrial ...
Ming Xia, Yiliu Tu
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Laser micromachining of goldblack coatings

Applied Optics, 2006
Goldblack deposits have been used as high-absorption coatings for thermal infrared detectors for a number of years, principally on large single, or few pixel detectors. We present a new technique that allows the benefits of goldblack to be applied to the current generation of small pixel silicon micromachined thermal infrared detectors.
N, Nelms, J, Dowson, N, Rizvi, T, Rohr
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Excimer laser micromachining

Advanced Materials for Optics and Electronics, 1993
AbstractThe machining of several materials such as polymers, metals and ceramics using excimer lasers (193, 248 and 308 nm) was investigated. By photoablation, micrometer resolution can be achieved for polymers if the wavelength and fluence are chosen properly. High‐definition processing of metals is complicated by the occurrence of surface melting. An
J. Ihlemann   +2 more
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