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Laser micromachining.

Medical device technology, 2003
Laser micromachining can be the key to further miniaturisation of devices. This article describes the different techniques for precision removal of material.
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Trends in laser micromachining

SPIE Proceedings, 2016
Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of
Frank Gaebler   +2 more
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Micromachining by lasers

Conference on Lasers and Electro-Optics Europe, 1994
The continually increasing demand for miniaturisation in the fields of electronics, micro-system-technology, and microoptics leads to higher and higher requirements for micromachining tools. Lasers are ideal for micromachining of metals, ceramics, and polymers.
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Micromachining with femtosecond lasers

Technical Digest. Summaries of Papers Presented at the Conference on Lasers and Electro-Optics. Conference Edition. 1998 Technical Digest Series, Vol.6 (IEEE Cat. No.98CH36178), 1998
Summary form only given. Two industrial applications of ultrashort-pulse machining process will be presented in this contribution. For the automotive industry, the production of high-aspect-ratio high-quality microholes for injection nozzles is required.
S. Nolte   +6 more
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Micromachining with Excimer Laser

CIRP Annals, 1998
Abstract This paper deals with micromachining of different materials using a 100 W excimer laser at RTM laboratories. The first part of the works reports the results of optical simulations carried out on several layouts calculated using a sequential ray tracer in order to evaluate the aberrations and improve the performance of the optics and masks ...
G. Ricciardi   +4 more
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Picosecond lasers in micromachining

ICALEO 2003: 22nd International Congress on Laser Materials Processing and Laser Microfabrication, 2003
Recent improvements to mode-locked lasers with picosecond pulse duration have fueled an increased interest for industrial applications, especially micromachining. Short pulses offer advantages for ablation of various materials. Reduced thermal load, low ablation threshold and other advantages of shorter pulses need to be tested for real application.
Gediminas Račiukaitis   +3 more
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Micromachining with copper lasers

SPIE Proceedings, 1997
In recent years the copper laser has undergone extensive development and has emerged as a leading and unique laser for micromachining. The copper laser is a high average power (10 - 250 W), high pulse repetition rate (2 - 32 kHz), visible laser (511 nm and 578 nm) that produces high peak power (typically 200 kW), short pulses (30 ns) and very good beam
Martyn R. H. Knowles   +5 more
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Laser applications for micromachining

AIP Conference Proceedings, 1996
Laser assisted silicon etching was developed for packaged microsensors. Laser assisted Cr CVD was applied for selective metallization on nonplaner surfaces. High rate laser CVD using low temperature condensation method was developed for micro assembly and projection patterning.
Masayoshi Esashi, Kazuyuki Minami
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Micromachining with copper lasers

Proceedings of LEOS'94, 2002
The copper laser is the new laser in materials processing. It has shown great potential as a tool for high precision manufacturing. Commercial copper laser machining systems are now commercially available. Recent breakthroughs and on-going research in copper lasers will continue to scale the efficiency, output power and beam quality of these lasers.
M. Knowles   +3 more
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Laser micromachining of efficient fiber microlenses

Applied Optics, 1990
We present results of the use of a CO(2) waveguide laser for the reproducible fabrication of efficient microlenses on single-mode optical fibers. Short intense laser pulses are used both to melt microlens tips to specific radii and to micromachine microlenses by ablative removal of small (~1-mum(2)) areas of glass from the fiber surface.
H M, Presby, A F, Benner, C A, Edwards
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