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Scaling of the structural characteristics of nanoholes created by local droplet etching
Journal of Applied Physics, 2014We study the tuneability of nanoholes created by local droplet etching of AlGaAs surfaces with Al droplets at varied coverage θ of the deposited droplet material and process temperature T. For the contact angle of the as-grown droplets a mean value of 66° is determined, which depends neither on θ nor on T.
Ch. Heyn, S. Schnüll, W. Hansen
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Influence of Ga coverage and As pressure on local droplet etching of nanoholes and quantum rings
Journal of Applied Physics, 2009We study the formation of nanoholes and quantum rings in GaAs and AlGaAs surfaces by local droplet etching (LDE) with Ga and In. The quantum rings are formed by the droplet etching process and surround the nanohole openings. Our data show that a low As pressure is essential for LDE and that process conditions with high Ga coverage yield formation of ...
Ch. Heyn +3 more
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Local Droplet Etching: Self-assembled Nanoholes for Quantum Dots and Nanopillars
2013We review the mechanism and recent applications of the self-organized patterning of semiconductor surfaces by local droplet etching (LDE). LDE is a nanofabrication technique that is applicable in situ during molecular beam epitaxy (MBE) and fully compatible with state-of-the-art MBE systems.
Christian Heyn +2 more
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Full wafer property control of local droplet etched GaAs quantum dots
Journal of Crystal Growth, 2022Hans-Georg Babin +5 more
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Excitonic states in GaAs quantum dots fabricated by local droplet etching
Physical Review B, 2014A. Graf +5 more
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Lipid droplet biogenesis and functions in health and disease
Nature Reviews Endocrinology, 2023Hongyuan Yang
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