Results 141 to 150 of about 14,741 (168)

Scaling of the structural characteristics of nanoholes created by local droplet etching

Journal of Applied Physics, 2014
We study the tuneability of nanoholes created by local droplet etching of AlGaAs surfaces with Al droplets at varied coverage θ of the deposited droplet material and process temperature T. For the contact angle of the as-grown droplets a mean value of 66° is determined, which depends neither on θ nor on T.
C. Heyn, S. Schnüll, W. Hansen
semanticscholar   +2 more sources

Mechanism and applications of local droplet etching

Journal of Crystal Growth, 2011
We give an overview on the fabrication and applications of deep nanoholes in semiconductor surfaces generated by self-assembled drilling with liquid metal droplets as etchant. The method is fully compatible with conventional molecular beam epitaxy equipment.
C. Heyn, A. Stemmann, M. Klingbeil, C. Strelow, T. Köppen, S. Mendach, W. Hansen   +6 more
semanticscholar   +2 more sources

Local droplet etching – Nanoholes, quantum dots, and air-gap heterostructures

AIP Conference Proceedings, 2014
Local droplet etching (LDE) allows the self-organized generation of nanoholes in semiconductor surfaces and is fully compatible with molecular beam epitaxy (MBE). The influence of the process parameters as well as of droplet and substrate materials on the LDE nanohole morphology is discussed.
C. Heyn, D. Sonnenberg, A. Graf, J. Kerbst, A. Stemmann, W. Hansen   +5 more
semanticscholar   +2 more sources

Droplet etching with indium – Intermixing and lattice mismatch

Journal of Crystal Growth, 2019
In contrast to Indium droplets the usage of Ga or Al droplets for the local droplet etching (LDE) technique is well established. It has been shown previously that In-droplets or In-alloys can be used for LDE with focus on small hole-depths at low etching
Christian Heyn
exaly   +2 more sources

Influence of Ga coverage and As pressure on local droplet etching of nanoholes and quantum rings

Journal of Applied Physics, 2009
We study the formation of nanoholes and quantum rings in GaAs and AlGaAs surfaces by local droplet etching (LDE) with Ga and In. The quantum rings are formed by the droplet etching process and surround the nanohole openings. Our data show that a low As pressure is essential for LDE and that process conditions with high Ga coverage yield formation of ...
C. Heyn, A. Stemmann, R. Eiselt, W. Hansen   +3 more
semanticscholar   +2 more sources

Local Droplet Etching: Self-assembled Nanoholes for Quantum Dots and Nanopillars

, 2013
We review the mechanism and recent applications of the self-organized patterning of semiconductor surfaces by local droplet etching (LDE). LDE is a nanofabrication technique that is applicable in situ during molecular beam epitaxy (MBE) and fully compatible with state-of-the-art MBE systems.
C. Heyn, D. Sonnenberg, W. Hansen
semanticscholar   +2 more sources

Local etching of nanoholes and quantum rings with InxGa1−x droplets

Journal of Applied Physics, 2009
We study the formation of nanoholes and quantum rings in GaAs and AlGaAs surfaces by local droplet etching with InxGa1−x. The rings are crystallized from droplet material and surround the nanohole openings. In particular, the influence of the In content x on density, diameter, and depth of the nanoholes is investigated.
A. Stemmann, T. Köppen, M. Grave, S. Wildfang, S. Mendach, W. Hansen, C. Heyn   +6 more
semanticscholar   +2 more sources

Influence of Local Droplet Etching Modes on the Transformation of Nanoholes Formed by Focused Ion Beams on a GaAs(111) Surface

Nanobiotechnology Reports
S. Balakirev, N. Chernenko, E. A. Lakhina, D. Kirichenko, N. Shandyba, D. D. Dukhan, M. Eremenko, M. Solodovnik   +7 more
semanticscholar   +2 more sources

Formation of symmetrical nanoholes by local droplet etching for site-controlled growth of single quantum dots

2023
В работе представлены результаты экспериментальных исследований процессов локального травления поверхности GaAs(001) каплями Ga при различных технологических режимах. Впервые на поверхности GaAs с ориентацией (001) получены симметричные наноуглубления пирамидальной формы с низкой поверхностной плотностью (~1·10^8 см^-2 и ниже), позволяющие обеспечить ...
Lakhina, Ekaterina, Shandyba, Nikita, Chernenko, Natalia, Kirichenko, Danil, Balakirev, Sergey, Solodovnik, Maxim   +5 more
openaire   +1 more source

Experimental study of nanoholes formation using local droplet etching of fib-modified GaAs (001) surface

2022
In this work, we study of the effect of focused ion beam (FIB) and pre-growth treatment based on local droplet etching (LDE) techniques combination on the regular nanohole array formation on GaAs(001) surface, which can act as template for selective quantum dot formation in future.
Chernenko, Natalia, Kirichenko, Danil, Shandyba, Nikita, Balakirev, Sergey, Eremenko, Michael, Solodovnik, Maxim   +5 more
openaire   +1 more source