Results 151 to 160 of about 248 (168)

Local droplet etching – Nanoholes, quantum dots, and air-gap heterostructures

AIP Conference Proceedings, 2014
Local droplet etching (LDE) allows the self-organized generation of nanoholes in semiconductor surfaces and is fully compatible with molecular beam epitaxy (MBE). The influence of the process parameters as well as of droplet and substrate materials on the LDE nanohole morphology is discussed.
Ch. Heyn, D. Sonnenberg, A. Graf, J. Kerbst, A. Stemmann, W. Hansen   +5 more
openaire   +2 more sources

Control of Morphology and Substrate Etching in InAs/InP Droplet Epitaxy Quantum Dots for Single and Entangled Photon Emitters [PDF]

ACS Applied Nano Materials, 2022
[Image: see text] We present a detailed atomic-resolution study of morphology and substrate etching mechanism in InAs/InP droplet epitaxy quantum dots (QDs) grown by metal–organic vapor phase epitaxy via cross-sectional scanning tunneling microscopy (X ...
Raja S R Gajjela, Elisa M Sala, J Heffernan   +2 more
exaly   +3 more sources

Local Droplet Etching: Self-assembled Nanoholes for Quantum Dots and Nanopillars

, 2013
We review the mechanism and recent applications of the self-organized patterning of semiconductor surfaces by local droplet etching (LDE). LDE is a nanofabrication technique that is applicable in situ during molecular beam epitaxy (MBE) and fully compatible with state-of-the-art MBE systems.
Christian Heyn, David Sonnenberg, Wolfgang Hansen   +2 more
openaire   +2 more sources

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Local etching of nanoholes and quantum rings with InxGa1−x droplets

Journal of Applied Physics, 2009
We study the formation of nanoholes and quantum rings in GaAs and AlGaAs surfaces by local droplet etching with InxGa1−x. The rings are crystallized from droplet material and surround the nanohole openings. In particular, the influence of the In content x on density, diameter, and depth of the nanoholes is investigated.
A. Stemmann, T. Köppen, M. Grave, S. Wildfang, S. Mendach, W. Hansen, Ch. Heyn   +6 more
openaire   +1 more source

Formation of symmetrical nanoholes by local droplet etching for site-controlled growth of single quantum dots

2023
В работе представлены результаты экспериментальных исследований процессов локального травления поверхности GaAs(001) каплями Ga при различных технологических режимах. Впервые на поверхности GaAs с ориентацией (001) получены симметричные наноуглубления пирамидальной формы с низкой поверхностной плотностью (~1·10^8 см^-2 и ниже), позволяющие обеспечить ...
Lakhina, Ekaterina, Shandyba, Nikita, Chernenko, Natalia, Kirichenko, Danil, Balakirev, Sergey, Solodovnik, Maxim   +5 more
openaire   +1 more source

Experimental study of nanoholes formation using local droplet etching of fib-modified GaAs (001) surface

2022
In this work, we study of the effect of focused ion beam (FIB) and pre-growth treatment based on local droplet etching (LDE) techniques combination on the regular nanohole array formation on GaAs(001) surface, which can act as template for selective quantum dot formation in future.
Chernenko, Natalia, Kirichenko, Danil, Shandyba, Nikita, Balakirev, Sergey, Eremenko, Michael, Solodovnik, Maxim   +5 more
openaire   +1 more source

Full wafer property control of local droplet etched GaAs quantum dots

Journal of Crystal Growth, 2022
Hans-Georg Babin, Nikolai Bart, Marcel Schmidt, Nikolai Spitzer, Andreas D. Wieck, Arne Ludwig   +5 more
openaire   +1 more source

Excitonic states in GaAs quantum dots fabricated by local droplet etching

Physical Review B, 2014
A. Graf, D. Sonnenberg, V. Paulava, A. Schliwa, Ch. Heyn, W. Hansen   +5 more
openaire   +1 more source

Modeling of Al and Ga Droplet Nucleation during Droplet Epitaxy or Droplet Etching

Nanomaterials, 2021
Ch Heyn, Heyn Christian
exaly  

Droplet etching with indium – Intermixing and lattice mismatch

Journal of Crystal Growth, 2019
Ch Heyn
exaly