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Pressure and velocity dependence of the material removal rate in the fast polishing process

Applied Optics, 2008
Based on the direct contact between the wafer and the pad, the pressure and velocity dependence of the material removal rate (MRR) in the fast polishing process (FPP) is investigated. There are three assumptions of the FPP material removal mechanism: the normal distribution of abrasive size, a periodic roughness of the pad surface, and the plastic ...
Yang, Wei   +3 more
openaire   +3 more sources

An Intelligent Approach for High Material Removal Rate Machining

2013
Machining is one of the most important manufacturing processes. Material removal rate (MRR) is a crucial issue in machining, but it is limited by machining stability lobe which depends on cutting dynamics. This chapter investigates an intelligent approach for increasing MRR.
Jhy-Cherng Tsai, Shen-Jhy Wang
openaire   +1 more source

Modelling the effect of tool material on material removal rate in electric discharge machining

Materials Research Proceedings, 2023
Abstract. Present study aims at modelling the impact of tool materials such as copper, tungsten carbide and brass tool on the electric discharge machining of AISI 202 stainless steel. It is well known that the electrical conductivity of tool material has an influence on the current density passed through interelectrode gap and hence sparking process ...
openaire   +1 more source

Investigation on residual scratch depth and material removal rate of scratching machining single crystal silicon with Berkovich indenter

Materials Science in Semiconductor Processing, 2019
Single crystal silicon is the basic material for the fabrication of micro-devices and micro-structures. It exhibits plastic behavior in micro/nano-machining.
Meng-Ran Ge   +3 more
semanticscholar   +1 more source

Material removal mechanism and material removal rate model of polishing process for quartz glass using soft particle

SPIE Proceedings, 2015
Fiber arrays are used to connect arrayed waveguide chips. The end-faces of fiber array components are multi-materials non-uniform surfaces. Their low polishing quality has become a bottleneck that restricts coupling performance of integrated photo-electronic devices.
Defu Liu, Guanglin Chen, Qing Hu
openaire   +1 more source

In-process material removal rate monitoring for abrasive belt grinding using multisensor fusion and 2D CNN algorithm

The International Journal of Advanced Manufacturing Technology, 2022
Nina Wang   +4 more
semanticscholar   +1 more source

Novel monitoring method for material removal rate considering quantitative wear of abrasive belts based on LightGBM learning algorithm

The International Journal of Advanced Manufacturing Technology, 2021
Nina Wang   +4 more
semanticscholar   +1 more source

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