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Achieving ultralow surface roughness and high material removal rate in fused silica via a novel acid SiO2 slurry and its chemical-mechanical polishing mechanism

, 2020
Fused silica is widely used as a substrate material in various optical precision devices, and its surface quality plays a significant role in determining the optical performance. However, it is difficult to achieve an ultra-smooth surface without obvious
Xiaolei Shi   +8 more
semanticscholar   +1 more source

Experimental investigation on material removal rate during abrasive water jet machining of GFRP composites

Materials Today: Proceedings, 2020
This paper outlines the impact of abrasive water jet control variables such as cutting speed and abrasive flow rate on material removal rate during abrasive water jet machining of GFRP composites.
D. Tripathi   +4 more
semanticscholar   +1 more source

Assist control for finishing process considering material removal rate

2011 15th International Conference on Advanced Robotics (ICAR), 2011
In high-variety low-volume manufacturing, parts are typically processed by handwork in order to minimize production cost and lead time. However, when a precise finishing process is required, handwork has problems of processing error and insufficient processing accuracy.
Ken'ichi Yano   +2 more
openaire   +1 more source

Material Removal Rate Prediction using the Classification-Regression Approach

2020 IEEE 22nd Electronics Packaging Technology Conference (EPTC), 2020
Chemical Mechanical Polishing (CMP) is one of the most critical process step in the fabrication of advanced packages, such as Fanout Wafer Level Packaging (FOWLP). CMP process requires tight and dynamic control of process parameters to achieve palnarization, high quality and reliability of organic or in-organic redistribution layer (RDL) surface ...
Kart-Leong Lim, Rahul Dutta
openaire   +1 more source

Predictive modeling of material removal rate in chemical mechanical planarization with physics-informed machine learning

Wear, 2019
Chemical mechanical planarization (CMP) is a high-precision and complex manufacturing process that removes material with chemical and mechanical forces in order to achieve highly planar surfaces.
Tianyu Yu, Zhixiong Li, Dazhong Wu
semanticscholar   +1 more source

Optimization of surface roughness and material removal rate in milling of AISI 1005 carbon steel using Taguchi approach

Materials Today: Proceedings, 2020
Taguchi technique was employed to find out the optimal cutting parameters in face milling operation of AISI 1005 steel using TiN coated tool. Three cutting parameters i.e.
Sunil Kumar   +2 more
semanticscholar   +1 more source

Prediction of Material Removal Rate for Chemical Mechanical Planarization Using Decision Tree-Based Ensemble Learning

Journal of manufacturing science and engineering, 2019
Chemical mechanical planarization (CMP) has been widely used in the semiconductor industry to create planar surfaces with a combination of chemical and mechanical forces.
Zhixiong Li, Dazhong Wu, Tianyu Yu
semanticscholar   +1 more source

Finite element modeling of material removal rate in micro-EDM process with and without ultrasonic vibration

Grey Systems Theory and Application, 2020
This research explores the finite element modeling of the crater and material removal rate (MRR) in micro-electrical discharge machining (micro-EDM) with and without vibration of the workpiece.
M. Choubey, K. Maity, Abhishek Sharma
semanticscholar   +1 more source

Modeling of Material Removal Rate in Micro-ECG Process

Journal of Manufacturing Science and Engineering, 2008
Microelectrochemical grinding (micro-ECG) is a variant of electrochemical grinding (ECG) process, in which material is removed by a combination of electrolytic dissolution and abrasive action that take place in a small interelectrode gap. This paper discusses analytical modeling of the material removal phenomenon in micro-ECG process to predict ...
GAIKWAD, KS, JOSHI, SS
openaire   +2 more sources

The Material Removal Rate of Metal Polishing Process

2009
The objective of this research is to better understand the mechanisms of material removal in the polishing process. This study is aimed to establish a material removal rate model for metal polishing to predict the result of metal polishing process.
Yeau-Ren Jeng, Pay-Yau Huang
openaire   +1 more source

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