Application of the MEMS Accelerometer as the Position Sensor in Linear Electrohydraulic Drive. [PDF]
Sensors (Basel), 2021 Rybarczyk D.
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A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass-Silicon Composite Wafers. [PDF]
Micromachines (Basel), 2021 He Y +5 more
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A Low-Noise MEMS Accelerometer Based on a Symmetrical Sandwich Capacitor Structure. [PDF]
Micromachines (Basel)Wang Z +6 more
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Identification of Mechanical Parameters of the Silicon Structure of a Capacitive MEMS Accelerometer. [PDF]
Materials (Basel)Kurpanik K +4 more
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Temperature Hysteresis Calibration Method of MEMS Accelerometer. [PDF]
Sensors (Basel)Kim HJ, Jung HK.
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Theoretical and Experimental Study on Nonlinear Failure of an MEMS Accelerometer under Dual Frequency Acoustic Interference. [PDF]
Sensors (Basel), 2021 Guo P, Zhang J, Feng L, Cui J, Xing C.
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Structure Design Optimization of a Differential Capacitive MEMS Accelerometer Based on a Multi-Objective Elitist Genetic Algorithm. [PDF]
Micromachines (Basel)Yang D +10 more
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Design and modelling of silicon MEMS accelerometer
, 2013 In developing micro electro mechanical systems (MEMS), finite element analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and ...
Baharom, Badrul Hanafi, Hrairi, Meftah
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Temperature Compensation for MEMS Accelerometer Based on a Fusion Algorithm. [PDF]
Micromachines (Basel)Guo Y +7 more
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A self-centering and stiffness-controlled MEMS accelerometer. [PDF]
Microsyst NanoengJin Y, Ma Z, Ye Z, Li M, Zheng X, Jin Z.
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