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Dynamics of mems accelerometer

open access: yes, 2010
The use of the MEMS (Micro-Electro Mechanical System) concept for manufacturing accelerometers is relatively new technology which requires rigorous performance tests before actual use in the field. Number of laboratory based experiments suggests that the measured signals by the MEMS accelerometers generally show deviation when compared with the ...
Badri, Abdellatef E.   +1 more
core   +14 more sources

A 3D-Printed Functional MEMS Accelerometer

open access: yes2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023
3D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-photon polymerization combined with the evaporation of metal strain gauge transducers. We measured the
Pagliano, Simone   +7 more
openaire   +3 more sources
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Autocalibration of MEMS Accelerometer

2006 IEEE Instrumentation and Measurement Technology Conference Proceedings, 2006
In this paper a new approach of an auto calibration method for micromechanical sensors is proposed. In particular, recalibration of acceleration sensors without any additional laboratory equipment is considered. If the device is stationary, the proposed procedure exploits the fact that the output vector of the acceleration sensor should match the ...
I. Frosio, F. Pedersini, N. A. Borghese
openaire   +2 more sources

Evaluation of MEMS capacitive accelerometers

IEEE Design & Test of Computers, 1999
Capacitive based microelectromechanical systems (MEMS) accelerometers are devices that measure acceleration based on a change in capacitance due to a moving plate or sensing element. These devices have been implemented in many commercial applications, such as automobile air bags, navigation, and instrumentation.
Alain BĂ©liveau   +3 more
openaire   +2 more sources

Radiometric effects in MEMS accelerometers

2017 IEEE SENSORS, 2017
MEMS (mico-electro-mechanical systems) accelerometers must meet rigorous performance requirements for future applications like indoor navigation. To further improve the sensors performance new effects like radiometric forces have to be considered. Small temperature gradients within the sensor package caused by outer or inner heat sources will cause ...
Cristian Nagel   +5 more
openaire   +2 more sources

MEMS Accelerometer with SAW

2018 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF), 2018
Was created the model of a microaccelerometer using MEMS technology. Were investigated the sensitivity and non-linear properties of the MEMS sensor in the commercial temperature range.
V. G. Nefedov   +4 more
openaire   +1 more source

High performance MEMS accelerometer (Gemini accelerometer)

2014 DGON Inertial Sensors and Systems (ISS), 2014
UTC Aerospace Systems (UTAS) has developed a family of high performance open loop accelerometers, which, branded under the name "Gemini", aim to meet the needs of aerospace and commercial applications. There are five different acceleration ranges in the family: 0.85g, 2g, 10g, 30g and 96g.
A. Malvern, P Collins
openaire   +1 more source

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