Results 141 to 150 of about 141,143 (179)

Design of a 2-axis MEMS accelerometer

2011 18th IEEE International Conference on Electronics, Circuits, and Systems, 2011
The miniaturisation and reduction in cost of acceleration sensors led to the increase of use of said sensors in a large number of devices. Such include: Inertial Measurement Units (IMUs), air-bag deployment mechanism and consumer electronic devices. This paper presents three alternative designs of capacitive sensing MEMS 2-axis accelerometers.
Jean Marie Darmanin, Ivan Grech, Edward Gatt, Owen Casha   +3 more
openaire   +2 more sources

A MEMS accelerometer for spindle monitoring system

10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2015
Vibration acceleration detection of spindle monitoring requires that the accelerometer has an adequate measurement sensitivity and response frequency above the interested range. This paper aims at design a kind of micro-electro-mechanical system (MEMS) accelerometer that can be used in the spindle component's vibration detection.
Peng Wang, Yulong Zhao, Bian Tian, Yingxue Li, Yan Liu 0049   +4 more
openaire   +2 more sources

Optical Interferometric MEMS Accelerometers

Laser & Photonics Reviews, 2023
AbstractLaser interferometry is one of the most accurate measurement technologies whose displacement resolution can reach the femtometer (fm) level. With the development of Micro‐Electro‐Mechanical Systems(MEMS) technology, many excellent optical interferometric MEMS sensors have emerged, which play an essential role in intelligent manufacturing ...
Minghui Zhao, Yonghong Qi, Hailong Wang, Zongxiang Xie, Bo Li, Hairong Wang, Xueyong Wei   +6 more
openaire   +1 more source

Material Fatigue and Reliability of MEMS Accelerometers

2008 IEEE International Symposium on Defect and Fault Tolerance of VLSI Systems, 2008
MEMS (microelectromechanical system) reliability has been a very important issue, especially for safety-critical applications. Due to the diversity and multiple energy domains involved, MEMS devices are vulnerable to various failure mechanisms. MEMS reliability under different failure mechanisms should be analyzed separately. Since most of MEMS devices
Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone
openaire   +1 more source

MEMS Piezoresistive Accelerometers

2014
MEMS piezoresistive accelerometers are inertial sensors which measure acceleration of the reference frame to which they are attached. These devices provide extremely localized acceleration-induced stress sensing with low noise outputs and have been the subject of academic as well as commercial research for quite a few years. This chapter deals with the
Tarun Kanti Bhattacharyya, Anindya Lal Roy   +1 more
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A Static Calibration of MEMS Accelerometers

2017
The paper describes micro electro mechanical systems (MEMS) accelerometers and their calibration making reliable and accurate measurements. The first part discusses the physics of acceleration and accelerometers. The next part describe one of the calibration techniques.
openaire   +2 more sources

Real-Time Autocalibration of MEMS Accelerometers

IEEE Transactions on Instrumentation and Measurement, 2014
In this paper, the self-calibration of micromechanical acceleration sensors is considered, specifically, based solely on user-generated movement data without the support of laboratory equipment or external sources. The autocalibration algorithm itself uses the fact that under static conditions, the squared norm of the measured sensor signal should ...
Glueck, Manuel, Oshinubi, Dayo, Schopp, Patrick, Manoli, Yiannos   +3 more
openaire   +2 more sources

A two-chip interface for a MEMS accelerometer

IEEE Transactions on Instrumentation and Measurement, 2002
A proposed third-order noise-shaping accelerometer interface circuit enhances the signal-to-noise ratio, compared with previously presented interface circuits. The solution for the two-chip implementation is described and a novel cross-coupled correlated double sampling integrator is proposed.
Tetsuya Kajita, Un-Ku Moon, Gabor C. Temes   +2 more
openaire   +1 more source

A stiffness-tunable MEMS accelerometer

Journal of Micromechanics and Microengineering, 2020
Abstract This paper reports a novel MEMS accelerometer whose effective stiffness can be adjusted flexibly and even tuned to almost zero by using the electrostatic softening effect of two parallel plate capacitors: the comb-finger capacitor and the triangular capacitor.
Yixuan Guo, Zhipeng Ma, Tengfei Zhang, Xudong Zheng, Zhonghe Jin   +4 more
openaire   +1 more source

MEMS accelerometers and their bio-applications

2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, 2012
In recent years, MEMS accelerometers have found widespread use in health monitoring applications. In this paper, we demonstrate two designs for their use in Bio-MEMS applications. First, a high resolution 3-axis accelerometer based on [1] is presented for the monitoring of an infant's heart rate and ultimately for the detection of the Sudden Infant ...
M. Trifunovic, A.M Vadiraj, W.D. van Driel   +2 more
openaire   +1 more source