Results 151 to 160 of about 6,536 (199)
Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer. [PDF]
Sensors (Basel), 2020 Liu D +6 more
europepmc +1 more source
Extraction of Bridge Fundamental Frequencies Utilizing a Smartphone MEMS Accelerometer. [PDF]
Sensors (Basel), 2019 Elhattab A, Uddin N, OBrien E.
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A Robust Fully-Integrated Digital-Output Inductive CMOS-MEMS Accelerometer with Improved Inductor Quality Factor. [PDF]
Micromachines (Basel), 2019 Chiu Y, Liu HW, Hong HC.
europepmc +1 more source
Application of MEMS accelerometer to geophysics
Application of MEMS accelerometer to geophysicsopenaire +1 more source
Autocalibration of MEMS Accelerometer
2006 IEEE Instrumentation and Measurement Technology Conference Proceedings, 2006 In this paper a new approach of an auto calibration method for micromechanical sensors is proposed. In particular, recalibration of acceleration sensors without any additional laboratory equipment is considered. If the device is stationary, the proposed procedure exploits the fact that the output vector of the acceleration sensor should match the ...
I. Frosio, F. Pedersini, N. A. Borghese
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Dynamics of mems accelerometer
, 2010 The use of the MEMS (Micro-Electro Mechanical System) concept for manufacturing accelerometers is relatively new technology which requires rigorous performance tests before actual use in the field. Number of laboratory based experiments suggests that the measured signals by the MEMS accelerometers generally show deviation when compared with the ...
Badri, Abdellatef E. +1 more
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Radiometric effects in MEMS accelerometers
2017 IEEE SENSORS, 2017MEMS (mico-electro-mechanical systems) accelerometers must meet rigorous performance requirements for future applications like indoor navigation. To further improve the sensors performance new effects like radiometric forces have to be considered. Small temperature gradients within the sensor package caused by outer or inner heat sources will cause ...
Cristian Nagel +5 more
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Evaluation of MEMS capacitive accelerometers
IEEE Design & Test of Computers, 1999Capacitive based microelectromechanical systems (MEMS) accelerometers are devices that measure acceleration based on a change in capacitance due to a moving plate or sensing element. These devices have been implemented in many commercial applications, such as automobile air bags, navigation, and instrumentation.
Alain Béliveau +3 more
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