Results 151 to 160 of about 141,143 (179)
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2013 IEEE SENSORS, 2013
This paper reports a sub-1G detectable MEMS accelerometer formed by the multilayer metal intended for post-CMOS process. High density of gold enables to minimize the footprint of the proof mass without compromising the sensitivity subjected to thermal-mechanical noise.
Daisuke Yamane +9 more
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This paper reports a sub-1G detectable MEMS accelerometer formed by the multilayer metal intended for post-CMOS process. High density of gold enables to minimize the footprint of the proof mass without compromising the sensitivity subjected to thermal-mechanical noise.
Daisuke Yamane +9 more
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Presettable micromachined MEMS accelerometers
Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291), 1999Rapidly emerging wireless distributed sensing applications such as seismic monitoring, civil structural safety, security, and military threat identification require small, inexpensive acceleration sensors with sensitivities limited by the background noise of the earth.
S. Valoff, W.J. Kaiser
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Autocalibration method of MEMS accelerometer
2011 International Conference on Mechatronic Science, Electric Engineering and Computer (MEC), 2011In this paper, we use uniaxial micro accelerometers to make an autocalibration for MEMS accelerometer. The uniaxial micro accelerometers is more common in our social life and also has higher resolution than triaxial micro accelerometer. We try to propose a more common and also more accurate method by borrowing ideas from Iuri Frosio, Federico Pedersini,
Hu Die, Zeng Chunnian, Liang Hong
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2021
MEMS ACCELEROMETER DESIGN SUMMARY Works about the MicroelectromechanicaJ Systems (MEMS) has begun in the late 1960's, when researchers began to think about that the fabrication technology, which is used for manufacturing of integrated electronic circuits, with only slight modifications, could also be used for fabrication of the mechanical ...
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MEMS ACCELEROMETER DESIGN SUMMARY Works about the MicroelectromechanicaJ Systems (MEMS) has begun in the late 1960's, when researchers began to think about that the fabrication technology, which is used for manufacturing of integrated electronic circuits, with only slight modifications, could also be used for fabrication of the mechanical ...
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A MEMS Accelerometer for Multicomponent Streamers
Proceedings, 2015Seismic Microelectromechanical systems (MEMS) accelerometers were introduced 15 years ago and have since gained acceptance in land seismic and then seafloor surveys. Using them in multicomponent towed-streamers introduces many new challenges. Multicomponent streamers require very dense single-sensor particle motion recording to adequately sample the ...
H. Paulson, V.A. Husom, N. Goujon
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D'ARSONVAL MOVEMENT MEMS ACCELEROMETER
The Journal of the Acoustical Society of America, 2012Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a housing, a proof mass suspended within the housing by at least one torsional flexure, and a torsional magnetic rebalancing component. In an example embodiment, the torsional magnetic rebalancing component includes at least one planar coil on ...
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Accuracy Characterization of a MEMS Accelerometer for Vibration Monitoring in a Rotating Framework
Applied Sciences (Switzerland), 2023Andrea Scorza +2 more
exaly
Summary of MEMS Capacitive Accelerometer
Advances in Engineering Technology ResearchMicro-Electro-Mechanical System (MEMS) accelerometer (MEMS accelerometer), as an important MEMS device, has been widely used in the field of high-precision electronic technology and consumer electronic products. At present, the technology of MEMS accelerometer has been mature, and the sensor based on capacitance principle, piezoelectric effect ...
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