Results 171 to 180 of about 6,536 (199)
Some of the next articles are maybe not open access.
A Static Calibration of MEMS Accelerometers
2017The paper describes micro electro mechanical systems (MEMS) accelerometers and their calibration making reliable and accurate measurements. The first part discusses the physics of acceleration and accelerometers. The next part describe one of the calibration techniques.
openaire +2 more sources
Tactical grade MEMS accelerometer
2017 DGON Inertial Sensors and Systems (ISS), 2017SAFRAN COLIBRYS introduce the MS1000 accelerometer, a new class of high performance MEMS accelerometer specially designed for inertial applications. It is based on Colibrys' long experience with MEMS technology and introduces an innovative design solution to meet tactical grade requirements.
S. Gonseth +3 more
openaire +1 more source
The effects of radiation on MEMS accelerometers
IEEE Transactions on Nuclear Science, 1996Exposing just the mechanical part (sensor) of MEMS accelerometers to protons and heavy ions caused large changes in outputs representing the measured acceleration for the ADXL50 and very small changes for the ADXL04. The large voltage shift measured for the ADXL50 is attributed to charge generated by the ions and trapped in dielectric layers below the ...
A.R. Knudson +8 more
openaire +1 more source
MEMS capacitive accelerometer: A review
Artıbilim: Adana Alparslan Türkeş Bilim ve Teknoloji Üniversitesi Fen Bilimleri Dergisi, 2023Micro-electro-mechanical systems sensors are integrated systems used in many fields such as consumer electronics, the automobile industry, and biomedical, and their dimensions change between micrometers and millimeters. MEMS capacitive accelerometers are the most widely used sensor type among MEMS accelerometer sensors.
Cihat Ediz AKBABA, Yusuf TANRIKULU
openaire +1 more source
A MEMS Accelerometer for Multicomponent Streamers
Proceedings, 2015Seismic Microelectromechanical systems (MEMS) accelerometers were introduced 15 years ago and have since gained acceptance in land seismic and then seafloor surveys. Using them in multicomponent towed-streamers introduces many new challenges. Multicomponent streamers require very dense single-sensor particle motion recording to adequately sample the ...
H. Paulson, V.A. Husom, N. Goujon
openaire +1 more source
Characteristics and performance of MEMS accelerometers
AIP Conference Proceedings, 1996Until recently, accelerometer manufacturing appeared to be a reasonably mature field. But, this situation changed rapidly when researchers began to build miniature accelerometers using micron scale lithographic techniques developed for producing integrated circuits.
R. A. Kant, D. J. Nagel
openaire +1 more source
2021
MEMS ACCELEROMETER DESIGN SUMMARY Works about the MicroelectromechanicaJ Systems (MEMS) has begun in the late 1960's, when researchers began to think about that the fabrication technology, which is used for manufacturing of integrated electronic circuits, with only slight modifications, could also be used for fabrication of the mechanical ...
openaire +1 more source
MEMS ACCELEROMETER DESIGN SUMMARY Works about the MicroelectromechanicaJ Systems (MEMS) has begun in the late 1960's, when researchers began to think about that the fabrication technology, which is used for manufacturing of integrated electronic circuits, with only slight modifications, could also be used for fabrication of the mechanical ...
openaire +1 more source
A method of fabricating MEMS accelerometers
2008 International Conference on Electronic Materials and Packaging, 2008In this paper we present a promising method for the fabrication of MEMS accelerometers. The method should be easily adapted to fabricating other devices such as pressure sensors, gyroscopes, and micro mirrors as well. Of the device SOI wafer is used to fabricate the sensing element and glass wafer is used as the substrate to support the device and for ...
S. Chen +3 more
openaire +1 more source
D'ARSONVAL MOVEMENT MEMS ACCELEROMETER
The Journal of the Acoustical Society of America, 2012Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a housing, a proof mass suspended within the housing by at least one torsional flexure, and a torsional magnetic rebalancing component. In an example embodiment, the torsional magnetic rebalancing component includes at least one planar coil on ...
openaire +1 more source
Sensing Tilt With MEMS Accelerometers
IEEE Sensors Journal, 2006A miniature tilt sensor made of standard microelectromechanical systems accelerometers and with an accuracy of 0.3deg over the full measurement range of pitch and roll is presented. Such sensor performance has been achieved, owing to the application of an original method of determining tilt angles, which is described in this paper. Experimental studies
Sergiusz Luczak +2 more
openaire +1 more source