Results 181 to 190 of about 6,536 (199)

Optical MEMS Accelerometers

2021
Balasubramanian Malayappan, Prasant Kumar Pattnaik   +1 more
openaire   +1 more source

MEMS Capacitive Accelerometers

Sensor Letters, 2007
Karabi Biswas, Siddhartha Sen, Pranab Kumar Dutta   +2 more
openaire   +1 more source

Self-powered triboelectric MEMS accelerometer

Nano Energy, 2023
Mohammad Alzgool, Benyamin Davaji, Shahrzad Towfighian   +2 more
exaly  

Summary of MEMS Capacitive Accelerometer

Advances in Engineering Technology Research
Micro-Electro-Mechanical System (MEMS) accelerometer (MEMS accelerometer), as an important MEMS device, has been widely used in the field of high-precision electronic technology and consumer electronic products. At present, the technology of MEMS accelerometer has been mature, and the sensor based on capacitance principle, piezoelectric effect ...
openaire   +1 more source

Design, fabrication and test of a bulk SiC MEMS accelerometer

Microelectronic Engineering, 2022
Haiwang Li, Tiantong Xu
exaly  

MEMS ACCELEROMETER CALIBRATION AT LOW FREQUENCIES

Sensors and Microsystems, 2008
Lo Castro F, Brambilla G, Verardi P, D'Amico A   +3 more
openaire   +3 more sources

A MEMS resonant accelerometer for low-frequency vibration detection

Sensors and Actuators A: Physical, 2018
Shudong Wang, Xueyong Wei, Yulong Zhao   +2 more
exaly  

Design and Analysis of MEMS Comb Drive Capacitive Accelerometer for SHM and Seismic Applications

Measurement: Journal of the International Measurement Confederation, 2016
R Joseph Daniel, K Sumangala
exaly  

A novel single axis capacitive MEMS accelerometer with double-sided suspension beams fabricated using μWEDM

Sensors and Actuators A: Physical, 2020
Mohammad Tahmasebipour, Ali Vafaie
exaly  

Research on temperature characteristic of parasitic capacitance in MEMS capacitive accelerometer

Sensors and Actuators A: Physical, 2019
Xianshan Dong, Qinwen Huang, Junhua Zhu   +2 more
exaly