Results 161 to 170 of about 6,536 (199)

MEMS Accelerometer with SAW

2018 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF), 2018
Was created the model of a microaccelerometer using MEMS technology. Were investigated the sensitivity and non-linear properties of the MEMS sensor in the commercial temperature range.
V. G. Nefedov, O.V. Shakin, L. V. Grigoryev, I. S. Morozov, N. V. Zhuravlev   +4 more
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High performance MEMS accelerometer (Gemini accelerometer)

2014 DGON Inertial Sensors and Systems (ISS), 2014
UTC Aerospace Systems (UTAS) has developed a family of high performance open loop accelerometers, which, branded under the name "Gemini", aim to meet the needs of aerospace and commercial applications. There are five different acceleration ranges in the family: 0.85g, 2g, 10g, 30g and 96g.
A. Malvern, P Collins
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Optical Interferometric MEMS Accelerometers

Laser & Photonics Reviews, 2023
AbstractLaser interferometry is one of the most accurate measurement technologies whose displacement resolution can reach the femtometer (fm) level. With the development of Micro‐Electro‐Mechanical Systems(MEMS) technology, many excellent optical interferometric MEMS sensors have emerged, which play an essential role in intelligent manufacturing ...
Minghui Zhao, Yonghong Qi, Hailong Wang, Zongxiang Xie, Bo Li, Hairong Wang, Xueyong Wei   +6 more
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Material Fatigue and Reliability of MEMS Accelerometers

2008 IEEE International Symposium on Defect and Fault Tolerance of VLSI Systems, 2008
MEMS (microelectromechanical system) reliability has been a very important issue, especially for safety-critical applications. Due to the diversity and multiple energy domains involved, MEMS devices are vulnerable to various failure mechanisms. MEMS reliability under different failure mechanisms should be analyzed separately. Since most of MEMS devices
Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone
openaire   +1 more source

Real-Time Autocalibration of MEMS Accelerometers

IEEE Transactions on Instrumentation and Measurement, 2014
In this paper, the self-calibration of micromechanical acceleration sensors is considered, specifically, based solely on user-generated movement data without the support of laboratory equipment or external sources. The autocalibration algorithm itself uses the fact that under static conditions, the squared norm of the measured sensor signal should ...
Glueck, Manuel, Oshinubi, Dayo, Schopp, Patrick, Manoli, Yiannos   +3 more
openaire   +2 more sources

A two-chip interface for a MEMS accelerometer

IEEE Transactions on Instrumentation and Measurement, 2002
A proposed third-order noise-shaping accelerometer interface circuit enhances the signal-to-noise ratio, compared with previously presented interface circuits. The solution for the two-chip implementation is described and a novel cross-coupled correlated double sampling integrator is proposed.
Tetsuya Kajita, Un-Ku Moon, Gabor C. Temes   +2 more
openaire   +1 more source

Design of a 2-axis MEMS accelerometer

2011 18th IEEE International Conference on Electronics, Circuits, and Systems, 2011
The miniaturisation and reduction in cost of acceleration sensors led to the increase of use of said sensors in a large number of devices. Such include: Inertial Measurement Units (IMUs), air-bag deployment mechanism and consumer electronic devices. This paper presents three alternative designs of capacitive sensing MEMS 2-axis accelerometers.
Jean Marie Darmanin, Ivan Grech, Edward Gatt, Owen Casha   +3 more
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A MEMS accelerometer for spindle monitoring system

10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2015
Vibration acceleration detection of spindle monitoring requires that the accelerometer has an adequate measurement sensitivity and response frequency above the interested range. This paper aims at design a kind of micro-electro-mechanical system (MEMS) accelerometer that can be used in the spindle component's vibration detection.
Peng Wang, Yulong Zhao, Bian Tian, Yingxue Li, Yan Liu 0049   +4 more
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MEMS Piezoresistive Accelerometers

2014
MEMS piezoresistive accelerometers are inertial sensors which measure acceleration of the reference frame to which they are attached. These devices provide extremely localized acceleration-induced stress sensing with low noise outputs and have been the subject of academic as well as commercial research for quite a few years. This chapter deals with the
Tarun Kanti Bhattacharyya, Anindya Lal Roy   +1 more
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A Monolithic MEMS Accelerometer Process

Key Engineering Materials, 2011
A monolithic MEMS accelerometer process was established. This process successfully combines our standard BiCMOS technology and MEMS surface micromachining technique. The acceleration sensing element is a kind of comb-finger structure which is built by polysilicon surface micromachining technique.
Xiao Gang Li, Yong Mei, Wen Gang Huang, Zheng Yuan Zhang, Jian Gen Li, Zhi Cheng Feng   +5 more
openaire   +1 more source