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Digital Optical 1¿N MEMS Switch Utilizing Microassembled Rotating Micromirror

2006
exaly  

MEMS-based optical switch design for reconfigurable, fault-tolerant optical backplanes

exaly  
7. clean energy
optical switch
microelectromechanical systems mems
mems
electrostatic actuator
micro-platform
integrated optics
optical waveguide
13. climate action
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