Results 51 to 60 of about 2,391 (245)
Transducers convert physical signals into electrical and optical representations, yet each mechanism is bounded by intrinsic trade‐offs across bandwidth, sensitivity, speed, and energy. This review maps transduction mechanisms across physical scale and frequency, showing how heterogeneous integration and multiphysics co‐design transform isolated ...
Aolei Xu +8 more
wiley +1 more source
The research on MEMS wireless sensing technology adapted to strong power frequency electromagnetic field environments is of great significance to our energy security, economic society, and even national security.
Fengyuan Gan +5 more
doaj +1 more source
Characterizing coupled MEMS resonators with an electrical resonator
Rapid development in micro/nano fabrication has enabled the shrinking of MEMS devices and the ability to fabricate them in large arrays. However, process variations and device mismatch have also raised testability issues in the MEMS industry. MEMS resonators have been coupled to simplify the characterization of the fabrication process and device ...
Guowei Tao, Bhaskar Choubey
openaire +1 more source
A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flexural springs.
Amr Kamel +9 more
openaire +2 more sources
Recent Advances of Slip Sensors for Smart Robotics
This review summarizes recent progress in robotic slip sensors across mechanical, electrical, thermal, optical, magnetic, and acoustic mechanisms, offering a comprehensive reference for the selection of slip sensors in robotic applications. In addition, current challenges and emerging trends are identified to advance the development of robust, adaptive,
Xingyu Zhang +8 more
wiley +1 more source
Design of GHz Mechanical Nanoresonator with High Q-Factor Based on Optomechanical System
Micro-electromechanical systems (MEMS) have dominated the interests of the industry due to its microminiaturization and high frequency for the past few decades.
Jun Jin +5 more
doaj +1 more source
Resonant Varifocal Mems Mirror
This paper presents a novel varifocal mirror made of a micro-electromechanical system (MEMS) continuous deformable mirror (DM). It uses resonant electrostatic actuation (REA) via single voltage waveform to vary the focus of a 1.6 mm circular DM. Unlike traditional DMs, REA eliminates the need for individually addressable electrodes and the use of ...
Samed Kocer +12 more
openaire +1 more source
A MEMS‐integrated metamaterial filter enables continuous, low‐voltage spectral tuning in the long‐wavelength infrared (LWIR). The device employs extraordinary optical transmission in a dual suspended metasurface stack, where electrostatic actuation precisely controls the intermembrane air gap.
Oleg Bannik +6 more
wiley +1 more source
Thickness‐Dependent Infrared Emissivity of Ultrathin Freestanding MoSiN Nanocomposite Membranes
ABSTRACT Metals and dielectrics show opposite trends in thickness‐dependent infrared emissivity: metallic films exhibit a rise in emissivity below a critical thickness, while dielectric films show a corresponding decline. For applications demanding both high emissivity and mechanical strength in membranes with nanoscale thickness, combining these ...
Reethu Sebastian +3 more
wiley +1 more source
Spacer‐Less Substrate‐Integrated Metasurface for Near‐Unity Terahertz Absorption
ABSTRACT Although conventional metal‐insulator‐metal (MIM) terahertz (THz) absorbers can provide near‐unity absorption, their multilayer stacks inevitably introduce additional thickness, mass, and residual stress, which limit their compatibility with THz thermal sensing platforms.
Zihao Zhao +6 more
wiley +1 more source

