Results 201 to 210 of about 10,763 (241)
Through graphene etching of porous Si by electroless metal assisted chemical etching
Panteli, C +3 more
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Structuring of Si into Multiple Scales by Metal‐Assisted Chemical Etching
Advanced Materials, 2021AbstractStructuring Si, ranging from nanoscale to macroscale feature dimensions, is essential for many applications. Metal‐assisted chemical etching (MaCE) has been developed as a simple, low‐cost, and scalable method to produce structures across widely different dimensions.
Dahl-Young Khang
exaly +3 more sources
Vapor Phase Metal‐Assisted Chemical Etching of Silicon
Advanced Functional Materials, 2014This work introduces and explores vapor phase metal‐assisted chemical etching (VP‐MaCE) of silicon as a method to bypass some of the challenges found in traditional liquid phase metal‐assisted chemical etching (LP‐MaCE). Average etch rates for Ag, Au, and Pd/Au catalysts are established at 31, 70, and 96 nm/min respectively, and the relationship ...
Owen Hildreth, Daniel R Schmidt
exaly +2 more sources
Metal‐Assisted Chemical Etching of Silicon: A Review
Advanced Materials, 2011This article presents an overview of the essential aspects in the fabrication of silicon and some silicon/germanium nanostructures by metal-assisted chemical etching. First, the basic process and mechanism of metal-assisted chemical etching is introduced.
Johannes de Boor
exaly +2 more sources
Metal Assisted Chemical Etch of Polycrystalline Silicon
Journal of Micro- and Nano-Manufacturing, 2022Abstract Metal-assisted chemical etching (MacEtch) of silicon shows reliable vertical anisotropic wet etching only in single-crystal silicon, which limits its applications to a small number of devices. This work extends the capabilities of MacEtch to polysilicon which has potential to enable high-volume and cost-sensitive applications ...
Crystal Barrera +4 more
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Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon
Nanoscale, 2012Metal assisted chemical etching with interconnected catalyst structures has been used to create a wide array of organized nanostructures. However, when patterned catalysts are not interconnected, but are isolated instead, vertical etching to form controlled features is difficult.
Lianto, P. +4 more
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Bulk Micromachining of Si by Metal‐assisted Chemical Etching
Small, 2014Bulk micromachining of Si is demonstrated by the well‐known metal‐assisted chemical etching (MaCE). Si microstructures, having lateral dimension from 5 μm up to millimeters, are successfully sculpted deeply into Si substrate, as deep as >100 μm.
Sang-Mi, Kim, Dahl-Young, Khang
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On the Metal-Assisted Chemical Etching of Nanoporous Silicon
ECS Meeting Abstracts, 2012Abstract not Available.
Dmitrii Goryachev +4 more
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Metal‐Assisted Chemical Etching of Silicon: A Review
Advanced Materials, 2010AbstractThis article presents an overview of the essential aspects in the fabrication of silicon and some silicon/germanium nanostructures by metal‐assisted chemical etching. First, the basic process and mechanism of metal‐assisted chemical etching is introduced.
Zhipeng Huang +4 more
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Metal-assisted chemical etching of molybdenum disulphide
2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO), 2015Large-scale two-dimensional (2D) electronics requires lithographic patterning of molybdenum disulphide (MoS2) into various nanostructures for device integration. However, fabrication of MoS2 nanostructures with well-defined edges remains challenging.
Wei Sun Leong, John T.L. Thong
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