Results 221 to 230 of about 10,737 (241)

Uniform Metal-assisted Chemical Etching and the Stability of Catalysts

MRS Proceedings, 2015
ABSTRACTRecently, metal-assisted chemical etching (MaCE) has been demonstrated as a promising technology in fabrication of uniform high-aspect-ratio (HAR) micro- and nanostructures on silicon substrates. In this work, MaCE experiments on 2 μm-wide line patterns were conducted using Au or Ag as catalysts.
Liyi Li, Colin M. Holmes, Jinho Hah, Owen J. Hildreth, Ching P. Wong   +4 more
openaire   +1 more source

Etching Volume Effect on the Morphology of Silicon Etched by Metal-Assisted Chemical Method

Applied Mechanics and Materials, 2012
Assisted by Ag nanoparticles, Si substrates were etched in aqueous solutions containing hydrofluoric acid (HF) and hydrogen peroxide (H2O2) with different volumes of etching solution. The etching morphology of Si wafers was found to be affected by the volumes.
Wei Wang, Li Juan Zhao, Ping Xin Song, Ying Jiu Zhang   +3 more
openaire   +1 more source

Effect of catalyst shape on etching orientation in metal-assisted chemical etching of silicon

CrystEngComm, 2014
Silicon nanowires with vertical, slanting and zigzag architectures have been fabricated by metal-assisted chemical etching of silicon wafers (n-Si(100), n-Si(111) and n-Si(110)).
Weiwei Xia, Jun Zhu, Haibo Wang, Xianghua Zeng   +3 more
openaire   +1 more source

(Invited) Light Enhanced Metal Assisted Chemical Etching of Silicon

ECS Meeting Abstracts, 2018
The study of electrochemicl porosification of silicon has allowed the production of different kinds of porosities in it, ranging from micropores to macropores, and directed by cristallographic planes, or electrical current lines. Additional studies have been on the use of different kinds of electrolytes, to etch faster, or with lower branching. Pore
Enrique Quiroga-González, Miguel Ángel Juárez-Estrada, Estela Gómez-Barojas   +2 more
openaire   +1 more source

Formation of GaP nanocones and micro-mesas by metal-assisted chemical etching

Physical Chemistry Chemical Physics, 2016
Metal-assisted chemical etching (MaCE) of a (100) n-type GaP using patterned Pd catalysts in a mixed solution of HF and H2O2 at room temperature is reported for the first time.
Jaehoon, Kim, Jihun, Oh
openaire   +2 more sources

Carrier Dynamics in Si Nanowires Fabricated by Metal-Assisted Chemical Etching

ACS Nano, 2012
Silicon nanowire arrays fabricated by metal-assisted wet chemical etching have emerged as a promising architecture for solar energy harvesting applications. Here we investigate the dynamics and transport properties of photoexcited carriers in nanowires derived from an intrinsic silicon wafer using the terahertz (THz) time-domain spectroscopy.
Hao, Tang, Li-Guo, Zhu, Liang, Zhao, Xuejin, Zhang, Jie, Shan, Shuit-Tong, Lee   +5 more
openaire   +2 more sources

Reducing manufacturing constraints of metal-assisted chemical etching

Integrated circuits, advanced sensors, and photovoltaics are just a subset of the technologies enabled by high throughput silicon nanomanufacturing. The manufacturing of these devices is not trivial. The dozens, if not hundreds, of processes that produce silicon-based devices impose limitations on subsequent steps. Inconsistencies and defects resulting
openaire   +1 more source

Replacing Metals with Oxides in Metal-Assisted Chemical Etching Enables Direct Fabrication of Silicon Nanowires by Solution Processing

Nano Letters, 2021
Cedric Boissiere, David Montero, Andrea Cattoni   +2 more
exaly  

Effect of Catalyst Shape and Etchant Composition on Etching Direction in Metal-Assisted Chemical Etching of Silicon to Fabricate 3D Nanostructures

ACS Nano, 2009
Owen Hildreth, Ching-Ping Wong
exaly  

Metal-Assisted Chemical Etching of Mesoporous Silicon - Optical Properties

Silicon, 2023
Parnian Alasti, Mahboubeh Houshiar
openaire   +1 more source