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Nanoscale, 2017
The functional three dimensional micro-nanostructures (3D-MNS) play crucial roles in integrated and miniaturized systems because of the excellent physical, mechanical, electric and optical properties. Nanoimprint lithography (NIL) has been versatile in the fabrication of 3D-MNS by pressing thermoplastic and photocuring resists into the imprint mold ...
Jie Zhang +5 more
openaire +2 more sources
The functional three dimensional micro-nanostructures (3D-MNS) play crucial roles in integrated and miniaturized systems because of the excellent physical, mechanical, electric and optical properties. Nanoimprint lithography (NIL) has been versatile in the fabrication of 3D-MNS by pressing thermoplastic and photocuring resists into the imprint mold ...
Jie Zhang +5 more
openaire +2 more sources
Metal-Assisted Chemical Etching of Mesoporous Silicon - Optical Properties
Silicon, 2023Parnian Alasti, Mahboubeh Houshiar
openaire +1 more source
Vertical silicon nanostructures via metal-assisted chemical etching
2017Seyeong Lee +3 more
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3D Etching technology for single crystal silicon using Metal-Assisted Chemical Etching.
The Proceedings of Mechanical Engineering Congress, JapanSatoshi Miyairi +5 more
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Metal-assisted chemical etching–based nanostructured silicon solar cells
2019Fatima Toor +3 more
openaire +1 more source
MacEtch: anisotropic metal-assisted chemical etching defies the textbooks
SPIE Newsroom, 2012openaire +1 more source