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Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure

The Journal of the Acoustical Society of America, 2006
A micro-mechanical pressure transducer is disclosed in which a capacitive transducer structure is integrated with an inductor coil to form a LC tank circuit, resonance frequency of which may be detected remotely by imposing an electromagnetic field on the transducer.
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A high-sensitivity MEMS fluxgate sensor with double-layer induction coils fabricated by micro-casting

Journal of Micromechanics and Microengineering
Abstract This paper presents a novel design of a micro-electro-mechanical-systems (MEMS) fluxgate sensor featuring double-layer induction coils. We utilize the micro-casting process which comprises two steps of using deep reactive ion etching to etch coil molds and filling the molds with molten Zn–Al alloy to form the coils. This process
Jiamin Yao, Taotao Ding, Lufeng Che
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Research on the Relationship between the Materials of Magnetic Cores and Sensitivity of the Micro Planar Inductive Sensor