A Multimodal Piezoelectric Vertical Sidewall Architecture for Scalable In‐Plane NEMS Resonators
A vertical in‐plane piezoelectric resonator design shifts frequency tuning from film thickness to lithographic lateral definition, facilitating monolithic multiband integration. Initially validated via microscale length‐extensional resonators, this cavities‐first fabrication approach scales to the nanoscale for high‐frequency operation.
Artem Gabrelian +3 more
wiley +1 more source
Scalable and Sustainable Dry Microfabrication Enabled by High-Precision and Wafer-Scale Transfer Lithography of Commercial Photoresists. [PDF]
Guo Q +7 more
europepmc +1 more source
Cumulative‐Stress‐Resilient Microelectromechanical Switches for Extreme Environment Applications
A microelectromechanical switch combines a thermomechanically stable suspended structure with radiation‐tolerant materials to preserve operation under cumulative shock (2900 g), vibration (2000 Hz), gamma irradiation (1 Mrad), extreme temperatures (4–450 K), and proton irradiation (100 MeV, 1012 p/cm2).
So‐Young Lee +9 more
wiley +1 more source
Nature's Microfabricated 3D Coupled Dual-Membrane Resonators-A Dynamic Analysis of Circular Diatom Frustules. [PDF]
Jia Y.
europepmc +1 more source
A Computational Approach for Biomimetic Design of Liver‐On‐A‐Chip
A biomimetic liver‐on‐a‐chip with antiparallel perfusion was designed using COMSOL‐guided simulation to replicate hepatic acinus transport. Full‐scale modelling revealed diffusion‐dominated, length‐dependent nutrient gradients and low‐shear conditions.
Zhenxu Yang +9 more
wiley +1 more source
An Integrated Photo-Magnetic Sensor Chip Using Giant Magnetoresistance (GMR) and Light-Dependent Resistor (LDR) Technologies Based on Microfabrication Compatibility. [PDF]
Sun X +6 more
europepmc +1 more source
Accelerating Biosensor Discovery: A Computationally‐Driven Pipeline for Microplastics Monitoring
A computationally guided pipeline unites molecular simulation, synthetic biology, electrochemical engineering, and machine learning to accelerate biosensor discovery. A Bacillus anthracis carbohydrate‐binding module is used to develop a high‐performance micro‐ and nanoplastics sensor with greatly reduced error and variability.
Gabriel X. Pereira +13 more
wiley +1 more source
Development and characterization of a chemically amplified positive-tone hybrid resist for thick-film microfabrication. [PDF]
Nasrallah N, Calas S, Etienne P.
europepmc +1 more source
Printed Wearable Sweat Rate Sensor for Continuous In Situ Perspiration Measurement
A wireless wearable sweat rate sensor system is presented, featuring digital 3D direct‐write printing on a flexible substrate with microfluidic layers for continuous, real‐time monitoring. Printed encapsulated metal electrodes are used for capacitance measurements, achieving high sensitivity (0.01 μL min−1) while maintaining a compact and lightweight ...
Mohammad Shafiqul Islam +6 more
wiley +1 more source
MEMS Energy Harvesting: Enabling Self-Powered Solutions. [PDF]
Jia Y.
europepmc +1 more source

