Results 11 to 20 of about 31,871 (287)
Single process femtosecond microfabrication of key components for integrated optics
, 2010 We present recent results on femtosecond microfabrication of key components for integrated optics such as highly curved low-loss waveguides in glasses, depressed cladding waveguides in crystals.
Bennion, Ian +5 more
core +9 more sources
Microfabrication Approaches on Magnetic Shape Memory Films
, 2023 This dataset contains all data used for the publication of the paper " Microfabrication Approaches on Magnetic Shape Memory Films ". The purpose of this research was to test different microfabrication approaches to fabricate patterned structures from ...
Leibniz Institute for Solid State and Materials Research +1 more
core +1 more source
Design and microfabrication of an electromagnetically-actuated soft-polymer micropump.
, 2010 Design and microfabrication of an electromagnetically-actuated soft-polymer ...
Yu. Zhou (7967201)
core +5 more sources
Microfabrication of thermionic and high-temperature field emission electron sources.
, 1994 Microfabrication of thermionic and high-temperature field emission electron ...
Dung-Ching. Perng (7994756)
core +5 more sources
Dual-Channel Light Intensity Modulation Method for Focusing in Projection Lithography
IEEE Photonics Journal, 2016 Focusing technique is the key factor in improving the resolution of projection lithography. In order to achieve high accuracy of focusing on the nanometer level, we present a focusing method based on dual-channel light intensity modulation.
Yanli Li +4 more
doaj +1 more source
Nano-Micro Letters, 2023 Highlights Imine groups in covalent organic framework (COF) films act as dual-active sites for humidity sensing, inducing an intrinsic enhanced mechanism of reversible protonated tautomerism via water molecule-induced hydrogen bonding.
Xiyu Chen +11 more
doaj +1 more source
A Moiré-Based Four-Channel Focusing and Leveling Scheme for Projection Lithography
IEEE Photonics Journal, 2014 Focusing and leveling are two imperative processes to adjust the wafer onto the ideal focal plane of projection lithography tools. Based on moiré fringes formed by particularly designed dual-grating marks, the four-channel focusing and leveling ...
Chengliang Di +6 more
doaj +1 more source
Influence of Collimation on Alignment Accuracy in Proximity Lithography
IEEE Photonics Journal, 2014 The alignment method based on moiré imaging has been wildly used for its high accuracy of physical measurement, which utilized the phase of moiré fringe to measure the relative linear displacement between the mask and the wafer.
Nan Wang +6 more
doaj +1 more source
Micromachines, 2017 A maskless lithography method to realize the rapid and cost-effective fabrication of micro-optics elements with arbitrary surface profiles is reported. A digital micro-mirror device (DMD) is applied to flexibly modulate that the exposure dose according ...
Qinyuan Deng +5 more
doaj +1 more source
Versatile Functionalization of Carbon Nanomaterials by Ferrate(VI)
Nano-Micro Letters, 2020 As a high-valent iron compound with Fe in the highest accessible oxidation state, ferrate(VI) brings unique opportunities for a number of areas where chemical oxidation is essential.
Ying Zhou +4 more
doaj +1 more source