Results 11 to 20 of about 30,833 (287)
A proof of concept of a BioMEMS glucose biosensor using microfabricated SU-8 films [PDF]
, 2009 The present project investigated and proved the concept of developing a novel BioMEMS glucose micro-biosensor using a simple one-step microfabrication process of the widely used SU-8 polymer.
Psoma, Sotiria D.
core +7 more sources
Citation: 'microfabrication' in the IUPAC Compendium of Chemical Terminology, 5th ed.; International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09527 • License: The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International for individual ...
Valentina Maria Lionello (18150057) +17 more
openaire +2 more sources
Single process femtosecond microfabrication of key components for integrated optics
, 2010 We present recent results on femtosecond microfabrication of key components for integrated optics such as highly curved low-loss waveguides in glasses, depressed cladding waveguides in crystals.
Bennion, Ian +5 more
core +9 more sources
Microfabrication of the Ammonia Plasma-Activated Nickel Nitride− Nickel Thin Film for Overall Water Splitting in the Microfluidic Membraneless Electrolyzer [PDF]
, 2021 Hydrogen production in the microfluidic alkaline membraneless electrolyzer (μAME) marks a new paradigm in sustainable energy technology. One challenge in this field is implementing a bifunctional catalyst to catalyze hydrogen evolution reaction and ...
Microfabrication of the Ammonia Plasma-Activated Nickel Nitride–Nickel Thin Film for Overall Water Splitting in the Microfluidic Membraneless Electrolyzer
core +1 more source
Nano-Focusing and Leveling System Based on Improved Phase Analysis
IEEE Photonics Journal, 2016 A nano-focusing and leveling system (FLS) based on improved phase analysis is proposed to measure the wafer height in lithography. Different from traditional methods, this paper applies a grating-based mark to conduct the measurement according to the ...
Yan Tang +5 more
doaj +1 more source
Moiré-Based Interferometry for Magnification Calibration of Bitelecentric Lens System
IEEE Photonics Journal, 2015 The bitelecentric lens system is widely used in many domains, such as 3-D measurements and tube inspection. The magnification calibration for such a system is a crucial problem for its further application in achieving precise measurements. However, it is
Yi Zhou +5 more
doaj +1 more source
Dual-Channel Light Intensity Modulation Method for Focusing in Projection Lithography
IEEE Photonics Journal, 2016 Focusing technique is the key factor in improving the resolution of projection lithography. In order to achieve high accuracy of focusing on the nanometer level, we present a focusing method based on dual-channel light intensity modulation.
Yanli Li +4 more
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Nano-Micro Letters, 2023 Highlights Imine groups in covalent organic framework (COF) films act as dual-active sites for humidity sensing, inducing an intrinsic enhanced mechanism of reversible protonated tautomerism via water molecule-induced hydrogen bonding.
Xiyu Chen +11 more
doaj +1 more source
Fabrication of ceramic micro-scale hollow components by micro-powder injection moulding [PDF]
, 2012 Rapid developments in microsystem technologies demand ceramic microcomponents of increasing geometrical complexity. State-of-the-art microfabrication routes of ceramics are either limited in geometrical complexity and/or high volume capabilities. This
Alcock, Jeffrey R., Attia, Usama M.
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A Moiré-Based Four-Channel Focusing and Leveling Scheme for Projection Lithography
IEEE Photonics Journal, 2014 Focusing and leveling are two imperative processes to adjust the wafer onto the ideal focal plane of projection lithography tools. Based on moiré fringes formed by particularly designed dual-grating marks, the four-channel focusing and leveling ...
Chengliang Di +6 more
doaj +1 more source