Results 131 to 140 of about 19,596 (227)

Inkjet 3D printing – towards new micromachining tool for MEMS fabrication [PDF]

open access: yesBulletin of the Polish Academy of Sciences: Technical Sciences, 2018
R. Walczak
doaj   +1 more source

Micromachines. Microactuators and Distributed Micromachines.

open access: yesThe Journal of The Institute of Electrical Engineers of Japan, 1997
openaire   +2 more sources

Micromachines

open access: yes, 2019
Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write nanofabrication of metallic nanostructures from metal organic precursor gases. It combines the established concepts of focused electron beam induced processing (FEBIP) and X-ray lithography (XRL).
openaire   +1 more source

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